JPS6346838U - - Google Patents

Info

Publication number
JPS6346838U
JPS6346838U JP13931486U JP13931486U JPS6346838U JP S6346838 U JPS6346838 U JP S6346838U JP 13931486 U JP13931486 U JP 13931486U JP 13931486 U JP13931486 U JP 13931486U JP S6346838 U JPS6346838 U JP S6346838U
Authority
JP
Japan
Prior art keywords
wafer
orientation flat
grounded
electron beam
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13931486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13931486U priority Critical patent/JPS6346838U/ja
Publication of JPS6346838U publication Critical patent/JPS6346838U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Elimination Of Static Electricity (AREA)
JP13931486U 1986-09-12 1986-09-12 Pending JPS6346838U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13931486U JPS6346838U (US20090163788A1-20090625-C00002.png) 1986-09-12 1986-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13931486U JPS6346838U (US20090163788A1-20090625-C00002.png) 1986-09-12 1986-09-12

Publications (1)

Publication Number Publication Date
JPS6346838U true JPS6346838U (US20090163788A1-20090625-C00002.png) 1988-03-30

Family

ID=31045105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13931486U Pending JPS6346838U (US20090163788A1-20090625-C00002.png) 1986-09-12 1986-09-12

Country Status (1)

Country Link
JP (1) JPS6346838U (US20090163788A1-20090625-C00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016535432A (ja) * 2013-09-27 2016-11-10 エルピーイー ソシエタ ペル アチオニ 支持エレメントを有するサセプタ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016535432A (ja) * 2013-09-27 2016-11-10 エルピーイー ソシエタ ペル アチオニ 支持エレメントを有するサセプタ

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