JPS6346472U - - Google Patents

Info

Publication number

JPS6346472U

JPS6346472U JP13969586U JP13969586U JPS6346472U JP S6346472 U JPS6346472 U JP S6346472U JP 13969586 U JP13969586 U JP 13969586U JP 13969586 U JP13969586 U JP 13969586U JP S6346472 U JPS6346472 U JP S6346472U

Authority

JP

Japan

Prior art keywords

exhaust system

gas source

liquid nitrogen

nitrogen trap

utility

Prior art date

1986-09-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
• 239000007788 liquid Substances 0.000 claims description 3
• 229910052757 nitrogen Inorganic materials 0.000 claims description 3
• 238000009792 diffusion process Methods 0.000 claims description 2
• 101100204059 Caenorhabditis elegans trap-2 gene Proteins 0.000 claims 1
• 239000007789 gas Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000000171 gas-source molecular beam epitaxy Methods 0.000 description 3