JPS6346466U - - Google Patents
Info
- Publication number
- JPS6346466U JPS6346466U JP13886786U JP13886786U JPS6346466U JP S6346466 U JPS6346466 U JP S6346466U JP 13886786 U JP13886786 U JP 13886786U JP 13886786 U JP13886786 U JP 13886786U JP S6346466 U JPS6346466 U JP S6346466U
- Authority
- JP
- Japan
- Prior art keywords
- support
- ion source
- pedestal
- support mechanism
- supports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims 2
- 230000005484 gravity Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13886786U JPS6346466U (OSRAM) | 1986-09-10 | 1986-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13886786U JPS6346466U (OSRAM) | 1986-09-10 | 1986-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6346466U true JPS6346466U (OSRAM) | 1988-03-29 |
Family
ID=31044235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13886786U Pending JPS6346466U (OSRAM) | 1986-09-10 | 1986-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6346466U (OSRAM) |
-
1986
- 1986-09-10 JP JP13886786U patent/JPS6346466U/ja active Pending