JPS6344134A - Image guide type radiation thermometer - Google Patents

Image guide type radiation thermometer

Info

Publication number
JPS6344134A
JPS6344134A JP18806086A JP18806086A JPS6344134A JP S6344134 A JPS6344134 A JP S6344134A JP 18806086 A JP18806086 A JP 18806086A JP 18806086 A JP18806086 A JP 18806086A JP S6344134 A JPS6344134 A JP S6344134A
Authority
JP
Japan
Prior art keywords
infrared rays
area
image
radiation thermometer
image guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18806086A
Other languages
Japanese (ja)
Inventor
Yutaka Sakurai
豊 桜井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP18806086A priority Critical patent/JPS6344134A/en
Publication of JPS6344134A publication Critical patent/JPS6344134A/en
Pending legal-status Critical Current

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  • Radiation Pyrometers (AREA)

Abstract

PURPOSE:To enable the measuring of temperature in a very small area accurately, by using an image guide for transmission of infrared rays to remove infrared rays radiated from outside the area to be measured. CONSTITUTION:Infrared rays radiated from an area 1 to be measured forms an image with an objective lens 6 on an incident end face 12 of an image guide 10. The image thus formed is transmitted as image to an emission end face 11 thereof with the image guide 10 and then, enters a mask filter 13. On the other hand, infrared rays radiated from outside the area 1 being measured are intercepted with a non-transmitting section 14 with a remarkably low infrared rays transmission factor of the mask filter 13 so that only the infrared rays radiated from the area 1 being measured enters an opto-electrical transducer element through a transmitting section 15 with a high infrared rays transmission factor to be converted into an electrical signal and displayed with a linearizer, a display circuit or the like. This enables the measuring of temperature in a very small area accurately.

Description

【発明の詳細な説明】 (産業上の利用分5f) 未発IN+は光学系にイメージガイドを使用した放射温
度計に関し、被柑定領域の面積が放射温1隻計の視野に
比して狭い場合でも精度の高い温度測定ができるように
したものである。
[Detailed description of the invention] (Industrial use 5f) Unemitted IN+ relates to a radiation thermometer that uses an image guide in the optical system, and the area of the target area is larger than the field of view of a single radiation thermometer. This allows highly accurate temperature measurement even in narrow spaces.

(従来技術) 従来用いられている放射温度計には大きく分けて次の二
つのタイプがある。
(Prior Art) Conventionally used radiation thermometers are roughly divided into the following two types.

一つはレンズ方式であり、これは第2図のように被測定
領域1から放射される赤外線をレンズ2によって集光し
、それを光電変換7kY−3によって一、+?気信号に
変換した後、リニアライザ4や表示回路5によって温度
を表示するようにしたものである。
One is the lens method, as shown in Fig. 2, in which infrared rays emitted from the measurement area 1 are condensed by a lens 2, and then converted into 1, +? by photoelectric conversion 7kY-3. After converting the temperature into a temperature signal, the linearizer 4 and display circuit 5 display the temperature.

他の一つは光ファイバカ式であり、第3b4のように被
測定領域1から放射される赤外線を文4物レンズ6で集
光し、それを光ファイバ7により伝送し、それを光電変
換素子3によって電気信−)に変換した後、リニアライ
ザ4や表示回路5によって温度を表示するようにしたも
のである。
The other one is an optical fiber type, in which the infrared rays emitted from the measurement area 1 are focused by a lens 6 as shown in No. 3b4, transmitted through an optical fiber 7, and transferred to a photoelectric conversion element. After the temperature is converted into an electric signal by 3, the temperature is displayed by a linearizer 4 and a display circuit 5.

光ファイ/へ方式はレンズ方式に比へて赤外線を集光す
るヘットを被Δ一定領域1に近ずけることができるため
、周囲からの放射赤外光やダストなどにより涜乱を受け
にくいという特徴がある。
Compared to the lens method, the optical fiber/head method allows the head that collects infrared rays to be brought closer to the constant Δ area 1, so it is less susceptible to disturbance from surrounding infrared light and dust. It has characteristics.

(従来技術のIF、1題点) 第2図や第3図のように被測定領域lの面積が放射温度
計の視テ?Aに比べて充分に大きい場合は問題ないが、
第4図のように視51Aより小さい場合は被0定領域l
の周囲からの放射赤外光を受けたり、検出距離が変動し
たりすると検出温度にl;差が生じるという問題がある
(IF of the prior art, 1 problem) As shown in Figures 2 and 3, is the area of the measurement area l visible to the radiation thermometer? There is no problem if it is sufficiently large compared to A, but
As shown in Fig. 4, if it is smaller than the visual field 51A, the zero constant area l
There is a problem that a difference occurs in the detected temperature when the sensor receives infrared radiation from the surroundings or when the detection distance changes.

又このような場合は被測定領域1と放射温度計との光軸
合せがむすかしいという問題もある。
Further, in such a case, there is a problem that it is difficult to align the optical axes of the measurement area 1 and the radiation thermometer.

(発明の[]的) 未発I51の目的は光フアイバ方式の放射温度計を改良
して、その視!fAより狭い被測定領域lの温度を測定
する場合でも、被測定領域l外から放射される赤外光U
S音)を除去して測定精度を高め、しかも被測定領域1
と放射温度計との光軸合せを容易にすることにある。
(Objective of the invention) The purpose of the unreleased I51 is to improve the optical fiber type radiation thermometer and to improve its visibility! Even when measuring the temperature of a measurement area l narrower than fA, infrared light U emitted from outside the measurement area l
S sound) is removed to improve measurement accuracy, and the measured area 1
The objective is to facilitate alignment of the optical axis between the radiation thermometer and the radiation thermometer.

(問題点を解決するためのf段) 未発用のイメージガ・fド方式放射温度計は、赤外線を
検出することによって温度を計測する放射温度計におい
て、第1図のように赤外線の伝送にイメージガイド10
を用い、同ガイド10の出射端面11側又は入射端面1
2側に被側定領域l外からの赤外線を遮蔽するマスクフ
ィルタ13を挿入してなるものである。
(F-stage to solve the problem) The unreleased ImageGa f-do method radiation thermometer is a radiation thermometer that measures temperature by detecting infrared rays. image guide 10
using the exit end face 11 side or the entrance end face 1 side of the same guide 10.
A mask filter 13 is inserted on the second side to block infrared rays from outside the target fixed area l.

(発明の作用) 未発用では第1図の被測定領域1から放射された赤外線
が対物レンズ6によってイメージガイド10の入射端面
12に結像する。この像はイメージガイド10によって
その出射端面11まで画像として伝送され、それからマ
スクフィルタ13に入り、被測定領域l外から放射され
る赤外線は同マスクフィルタ13の赤外線透過率の著し
く低い非透過部14により遮断され、被測定領域lから
放射される赤外線だけが赤外線透過率の高い′rlLj
!1部15を通って光電変換素子3に入り、そこで゛心
気信号に変換されてリニアライザや表示回路などに表示
される。
(Function of the Invention) In the unreleased mode, infrared rays emitted from the measurement area 1 shown in FIG. This image is transmitted as an image by the image guide 10 to its output end face 11, and then enters the mask filter 13. Only the infrared rays emitted from the measurement area l are blocked by ′rlLj with high infrared transmittance.
! The signal passes through the first section 15 and enters the photoelectric conversion element 3, where it is converted into an hypochondriacal signal and displayed on a linearizer, display circuit, etc.

(実施例) 未発1!1では赤外線の伝送に画像伝送を目的として規
則正しく配Aされた光フアイババンドル、すなわちイメ
ージガイド10を用いる。
(Embodiment) In the unreleased 1!1, optical fiber bundles A regularly arranged, ie, image guides 10, are used for transmitting infrared rays for the purpose of transmitting images.

マスクフィルタ13は赤外線透過率の7i1.<低い非
透過部14と赤外線透過率の高い透′jj1部15とか
ら構成され、透過部15の形状は被測定領域1の形状と
相似形にしである。これにより対物レンズ6の向きや方
向を調節すると被側定領域lが透過部15内にT度入る
ようにしである。
The mask filter 13 has an infrared transmittance of 7i1. It is composed of a non-transparent part 14 with a low transmittance and a transparent part 15 with a high infrared transmittance, and the shape of the transparent part 15 is similar to the shape of the region 1 to be measured. As a result, when the orientation and direction of the objective lens 6 is adjusted, the fixed area l to be exposed enters the transmitting portion 15 by T degrees.

又本発明ではマスクフィルタ13と光電変換素子3の間
にミラーあるいはハーフミラ−を挿入して光軸合せと湿
度計測をほぼ同時に行なうようにしてもよい。
Further, in the present invention, a mirror or a half mirror may be inserted between the mask filter 13 and the photoelectric conversion element 3 to perform optical axis alignment and humidity measurement almost simultaneously.

(発明の効果) 未発IIは次のような効果がある。(Effect of the invention) Unreleased II has the following effects.

(1)イメージガイド10を使用し、しかもマスクフィ
ルタ13を使用して被測定領域l外の赤外光を除外でき
るようにしたので、微小領域の温度を精度良く計711
することができる。
(1) Since the image guide 10 is used and the mask filter 13 is used to exclude infrared light outside the measurement area, the temperature of a minute area can be accurately measured.
can do.

(2)イメージガイドlOを使用したので被測定領域1
と放射温度計との光軸合せを[i視で行なうことができ
、光軸合せが非常に容易になる。
(2) Since the image guide IO was used, the measurement area 1
The optical axes can be aligned with the radiation thermometer using the i-view, making it very easy to align the optical axes.

(3)赤外光の伝送にイメージガイド10を用いるため
(ファイバは耐熱性があるため)開光ファ1バを被測定
領域lに近づけることができる。従って被測定領域l外
からの赤外光(雑音)が入りに〈〈なり、高拮度の測定
が可使になる。
(3) Since the image guide 10 is used to transmit infrared light (because the fiber is heat resistant), the open fiber 1 can be brought close to the measurement area l. Therefore, infrared light (noise) from outside the region to be measured l enters, making it possible to perform highly consistent measurements.

(4)赤外光の伝送にイメージガイドlOを用いるため
(ファイ/゛・はIIr iA性があるため)同光ファ
イバの光路を自由に選ぶことができ、従って狭いJ↓を
所や屈曲した場所への配置も容易になる。
(4) Since the image guide IO is used for the transmission of infrared light (because the optical fiber has IIr iA properties), the optical path of the optical fiber can be freely selected, and therefore the narrow J↓ or bend can be freely selected. It also becomes easier to place it in a location.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の放射温度計の一例を示す説II図、第
2図は従来のレンズ方式の放射温度計の説II 14 
、第3図は従来の光ファ・イパ方式の放射温度計の説明
図、第4図は従来の光フアイバ方式の放射温度計であっ
て被測定領域が放射温度計の視野に比べて小さい場合の
説明図である。 1は被測定領域 10はイメージガイド 11は出射端面 12は入射端面 13はマスクフィルタ
Fig. 1 is a diagram II showing an example of the radiation thermometer of the present invention, and Fig. 2 is a diagram II showing a conventional lens-type radiation thermometer.
, Fig. 3 is an explanatory diagram of a conventional optical fiber type radiation thermometer, and Fig. 4 is an explanatory diagram of a conventional optical fiber type radiation thermometer, when the area to be measured is smaller than the field of view of the radiation thermometer. FIG. 1 is a measurement area 10 is an image guide 11 is an output end face 12 is an entrance end face 13 is a mask filter

Claims (1)

【特許請求の範囲】[Claims] 赤外線を検出することによって温度を計測する放射温度
計において、赤外線の伝送にイメージガイドを用い、同
ガイドの出射端側又は入射端側に被測定領域外からの赤
外線を遮蔽するマスクフィルタを挿入することを特徴と
するイメージガイド方式放射温度計。
In a radiation thermometer that measures temperature by detecting infrared rays, an image guide is used to transmit infrared rays, and a mask filter is inserted at the output end or input end of the guide to block infrared rays from outside the measurement area. An image-guided radiation thermometer characterized by:
JP18806086A 1986-08-11 1986-08-11 Image guide type radiation thermometer Pending JPS6344134A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18806086A JPS6344134A (en) 1986-08-11 1986-08-11 Image guide type radiation thermometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18806086A JPS6344134A (en) 1986-08-11 1986-08-11 Image guide type radiation thermometer

Publications (1)

Publication Number Publication Date
JPS6344134A true JPS6344134A (en) 1988-02-25

Family

ID=16216992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18806086A Pending JPS6344134A (en) 1986-08-11 1986-08-11 Image guide type radiation thermometer

Country Status (1)

Country Link
JP (1) JPS6344134A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03264829A (en) * 1990-03-14 1991-11-26 Jisedai Koukuuki Kiban Gijutsu Kenkyusho:Kk Structure of light receiving part of fiber radiation thermometer
US6234669B1 (en) * 1996-12-24 2001-05-22 Raytek Gmbh Device for measuring temperature without contact
JP2018001157A (en) * 2016-07-04 2018-01-11 ノードソン コーポレーションNordson Corporation Inspection device and method for inspecting adhesive pattern on substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61283839A (en) * 1985-06-10 1986-12-13 Hitachi Ltd Radiation temperature measuring apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61283839A (en) * 1985-06-10 1986-12-13 Hitachi Ltd Radiation temperature measuring apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03264829A (en) * 1990-03-14 1991-11-26 Jisedai Koukuuki Kiban Gijutsu Kenkyusho:Kk Structure of light receiving part of fiber radiation thermometer
US6234669B1 (en) * 1996-12-24 2001-05-22 Raytek Gmbh Device for measuring temperature without contact
JP2018001157A (en) * 2016-07-04 2018-01-11 ノードソン コーポレーションNordson Corporation Inspection device and method for inspecting adhesive pattern on substrate
US11511531B2 (en) 2016-07-04 2022-11-29 Nordson Corporation Inspection device and method for inspecting an adhesive pattern on a substrate
US11801672B2 (en) 2016-07-04 2023-10-31 Nordson Corporation Inspection device and method for inspecting an adhesive pattern on a substrate

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