JPS6343975U - - Google Patents

Info

Publication number
JPS6343975U
JPS6343975U JP13876286U JP13876286U JPS6343975U JP S6343975 U JPS6343975 U JP S6343975U JP 13876286 U JP13876286 U JP 13876286U JP 13876286 U JP13876286 U JP 13876286U JP S6343975 U JPS6343975 U JP S6343975U
Authority
JP
Japan
Prior art keywords
plate
unit
rail
guide plate
moves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13876286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0423102Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13876286U priority Critical patent/JPH0423102Y2/ja
Publication of JPS6343975U publication Critical patent/JPS6343975U/ja
Application granted granted Critical
Publication of JPH0423102Y2 publication Critical patent/JPH0423102Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Special Conveying (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Handcart (AREA)
JP13876286U 1986-09-09 1986-09-09 Expired JPH0423102Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13876286U JPH0423102Y2 (enrdf_load_stackoverflow) 1986-09-09 1986-09-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13876286U JPH0423102Y2 (enrdf_load_stackoverflow) 1986-09-09 1986-09-09

Publications (2)

Publication Number Publication Date
JPS6343975U true JPS6343975U (enrdf_load_stackoverflow) 1988-03-24
JPH0423102Y2 JPH0423102Y2 (enrdf_load_stackoverflow) 1992-05-28

Family

ID=31044036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13876286U Expired JPH0423102Y2 (enrdf_load_stackoverflow) 1986-09-09 1986-09-09

Country Status (1)

Country Link
JP (1) JPH0423102Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006339665A (ja) * 2000-10-12 2006-12-14 Ebara Corp 半導体基板製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006339665A (ja) * 2000-10-12 2006-12-14 Ebara Corp 半導体基板製造装置

Also Published As

Publication number Publication date
JPH0423102Y2 (enrdf_load_stackoverflow) 1992-05-28

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