JPS634380U - - Google Patents
Info
- Publication number
- JPS634380U JPS634380U JP9951086U JP9951086U JPS634380U JP S634380 U JPS634380 U JP S634380U JP 9951086 U JP9951086 U JP 9951086U JP 9951086 U JP9951086 U JP 9951086U JP S634380 U JPS634380 U JP S634380U
- Authority
- JP
- Japan
- Prior art keywords
- refrigerator
- condensation
- motor
- cryopump
- cold head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005494 condensation Effects 0.000 claims description 4
- 238000009833 condensation Methods 0.000 claims description 4
- 238000001179 sorption measurement Methods 0.000 claims description 4
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9951086U JPS634380U (fr) | 1986-06-27 | 1986-06-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9951086U JPS634380U (fr) | 1986-06-27 | 1986-06-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS634380U true JPS634380U (fr) | 1988-01-12 |
Family
ID=30968450
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9951086U Pending JPS634380U (fr) | 1986-06-27 | 1986-06-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS634380U (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9415325B2 (en) | 2012-02-23 | 2016-08-16 | Sumitomo Heavy Industries, Ltd. | Cryopump, method of regenerating cryopump, and control device for cryopump |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5922691A (ja) * | 1982-07-27 | 1984-02-04 | 株式会社モルテン | 管内洗浄具 |
-
1986
- 1986-06-27 JP JP9951086U patent/JPS634380U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5922691A (ja) * | 1982-07-27 | 1984-02-04 | 株式会社モルテン | 管内洗浄具 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9415325B2 (en) | 2012-02-23 | 2016-08-16 | Sumitomo Heavy Industries, Ltd. | Cryopump, method of regenerating cryopump, and control device for cryopump |