JPS6343635U - - Google Patents

Info

Publication number
JPS6343635U
JPS6343635U JP13547086U JP13547086U JPS6343635U JP S6343635 U JPS6343635 U JP S6343635U JP 13547086 U JP13547086 U JP 13547086U JP 13547086 U JP13547086 U JP 13547086U JP S6343635 U JPS6343635 U JP S6343635U
Authority
JP
Japan
Prior art keywords
casing
inner chamber
communication pipe
wall
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13547086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13547086U priority Critical patent/JPS6343635U/ja
Publication of JPS6343635U publication Critical patent/JPS6343635U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP13547086U 1986-09-05 1986-09-05 Pending JPS6343635U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13547086U JPS6343635U (enrdf_load_stackoverflow) 1986-09-05 1986-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13547086U JPS6343635U (enrdf_load_stackoverflow) 1986-09-05 1986-09-05

Publications (1)

Publication Number Publication Date
JPS6343635U true JPS6343635U (enrdf_load_stackoverflow) 1988-03-23

Family

ID=31037685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13547086U Pending JPS6343635U (enrdf_load_stackoverflow) 1986-09-05 1986-09-05

Country Status (1)

Country Link
JP (1) JPS6343635U (enrdf_load_stackoverflow)

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