JPS6343454U - - Google Patents

Info

Publication number

JPS6343454U

JPS6343454U JP13596086U JP13596086U JPS6343454U JP S6343454 U JPS6343454 U JP S6343454U JP 13596086 U JP13596086 U JP 13596086U JP 13596086 U JP13596086 U JP 13596086U JP S6343454 U JPS6343454 U JP S6343454U

Authority

JP

Japan

Prior art keywords

insulating film

strip

conductive thin

shaped

thin film

Prior art date

1986-09-04

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010408 film Substances 0.000 claims 5
• 239000010409 thin film Substances 0.000 claims 4
• 239000004020 conductor Substances 0.000 claims 1
• 230000000149 penetrating effect Effects 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1

Cited By (1)