JPS6343424U - - Google Patents

Info

Publication number
JPS6343424U
JPS6343424U JP13636186U JP13636186U JPS6343424U JP S6343424 U JPS6343424 U JP S6343424U JP 13636186 U JP13636186 U JP 13636186U JP 13636186 U JP13636186 U JP 13636186U JP S6343424 U JPS6343424 U JP S6343424U
Authority
JP
Japan
Prior art keywords
wafer carrier
loader
core tube
wafer
mounting portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13636186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13636186U priority Critical patent/JPS6343424U/ja
Publication of JPS6343424U publication Critical patent/JPS6343424U/ja
Pending legal-status Critical Current

Links

JP13636186U 1986-09-04 1986-09-04 Pending JPS6343424U (US20030157376A1-20030821-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13636186U JPS6343424U (US20030157376A1-20030821-M00001.png) 1986-09-04 1986-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13636186U JPS6343424U (US20030157376A1-20030821-M00001.png) 1986-09-04 1986-09-04

Publications (1)

Publication Number Publication Date
JPS6343424U true JPS6343424U (US20030157376A1-20030821-M00001.png) 1988-03-23

Family

ID=31039398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13636186U Pending JPS6343424U (US20030157376A1-20030821-M00001.png) 1986-09-04 1986-09-04

Country Status (1)

Country Link
JP (1) JPS6343424U (US20030157376A1-20030821-M00001.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01230243A (ja) * 1988-03-10 1989-09-13 Tel Sagami Ltd 縦型熱処理装置用移送装置
JPH0348438A (ja) * 1989-07-17 1991-03-01 Tokyo Electron Sagami Ltd 熱処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01230243A (ja) * 1988-03-10 1989-09-13 Tel Sagami Ltd 縦型熱処理装置用移送装置
JPH0348438A (ja) * 1989-07-17 1991-03-01 Tokyo Electron Sagami Ltd 熱処理装置

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