JPS6342831U - - Google Patents

Info

Publication number
JPS6342831U
JPS6342831U JP13560486U JP13560486U JPS6342831U JP S6342831 U JPS6342831 U JP S6342831U JP 13560486 U JP13560486 U JP 13560486U JP 13560486 U JP13560486 U JP 13560486U JP S6342831 U JPS6342831 U JP S6342831U
Authority
JP
Japan
Prior art keywords
flow rate
detection means
temperature
gas
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13560486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13560486U priority Critical patent/JPS6342831U/ja
Publication of JPS6342831U publication Critical patent/JPS6342831U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
JP13560486U 1986-09-05 1986-09-05 Pending JPS6342831U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13560486U JPS6342831U (enrdf_load_stackoverflow) 1986-09-05 1986-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13560486U JPS6342831U (enrdf_load_stackoverflow) 1986-09-05 1986-09-05

Publications (1)

Publication Number Publication Date
JPS6342831U true JPS6342831U (enrdf_load_stackoverflow) 1988-03-22

Family

ID=31037945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13560486U Pending JPS6342831U (enrdf_load_stackoverflow) 1986-09-05 1986-09-05

Country Status (1)

Country Link
JP (1) JPS6342831U (enrdf_load_stackoverflow)

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