JPS6342623U - - Google Patents
Info
- Publication number
- JPS6342623U JPS6342623U JP13668386U JP13668386U JPS6342623U JP S6342623 U JPS6342623 U JP S6342623U JP 13668386 U JP13668386 U JP 13668386U JP 13668386 U JP13668386 U JP 13668386U JP S6342623 U JPS6342623 U JP S6342623U
- Authority
- JP
- Japan
- Prior art keywords
- tunnel
- clean room
- exhaust duct
- slit
- transport vehicle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13668386U JPS6342623U (es) | 1986-09-08 | 1986-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13668386U JPS6342623U (es) | 1986-09-08 | 1986-09-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6342623U true JPS6342623U (es) | 1988-03-22 |
Family
ID=31040033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13668386U Pending JPS6342623U (es) | 1986-09-08 | 1986-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6342623U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06144565A (ja) * | 1992-11-13 | 1994-05-24 | Daifuku Co Ltd | クリーンルーム用搬送設備 |
-
1986
- 1986-09-08 JP JP13668386U patent/JPS6342623U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06144565A (ja) * | 1992-11-13 | 1994-05-24 | Daifuku Co Ltd | クリーンルーム用搬送設備 |
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