JPS6342158U - - Google Patents
Info
- Publication number
- JPS6342158U JPS6342158U JP13638086U JP13638086U JPS6342158U JP S6342158 U JPS6342158 U JP S6342158U JP 13638086 U JP13638086 U JP 13638086U JP 13638086 U JP13638086 U JP 13638086U JP S6342158 U JPS6342158 U JP S6342158U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- deposition material
- gear
- shaft
- support body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13638086U JPH0538047Y2 (enExample) | 1986-09-04 | 1986-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13638086U JPH0538047Y2 (enExample) | 1986-09-04 | 1986-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6342158U true JPS6342158U (enExample) | 1988-03-19 |
| JPH0538047Y2 JPH0538047Y2 (enExample) | 1993-09-27 |
Family
ID=31039436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13638086U Expired - Lifetime JPH0538047Y2 (enExample) | 1986-09-04 | 1986-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538047Y2 (enExample) |
-
1986
- 1986-09-04 JP JP13638086U patent/JPH0538047Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0538047Y2 (enExample) | 1993-09-27 |