JPS6342158U - - Google Patents

Info

Publication number
JPS6342158U
JPS6342158U JP13638086U JP13638086U JPS6342158U JP S6342158 U JPS6342158 U JP S6342158U JP 13638086 U JP13638086 U JP 13638086U JP 13638086 U JP13638086 U JP 13638086U JP S6342158 U JPS6342158 U JP S6342158U
Authority
JP
Japan
Prior art keywords
vapor deposition
deposition material
gear
shaft
support body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13638086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0538047Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13638086U priority Critical patent/JPH0538047Y2/ja
Publication of JPS6342158U publication Critical patent/JPS6342158U/ja
Application granted granted Critical
Publication of JPH0538047Y2 publication Critical patent/JPH0538047Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13638086U 1986-09-04 1986-09-04 Expired - Lifetime JPH0538047Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13638086U JPH0538047Y2 (enExample) 1986-09-04 1986-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13638086U JPH0538047Y2 (enExample) 1986-09-04 1986-09-04

Publications (2)

Publication Number Publication Date
JPS6342158U true JPS6342158U (enExample) 1988-03-19
JPH0538047Y2 JPH0538047Y2 (enExample) 1993-09-27

Family

ID=31039436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13638086U Expired - Lifetime JPH0538047Y2 (enExample) 1986-09-04 1986-09-04

Country Status (1)

Country Link
JP (1) JPH0538047Y2 (enExample)

Also Published As

Publication number Publication date
JPH0538047Y2 (enExample) 1993-09-27

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