JPS6342158U - - Google Patents

Info

Publication number
JPS6342158U
JPS6342158U JP13638086U JP13638086U JPS6342158U JP S6342158 U JPS6342158 U JP S6342158U JP 13638086 U JP13638086 U JP 13638086U JP 13638086 U JP13638086 U JP 13638086U JP S6342158 U JPS6342158 U JP S6342158U
Authority
JP
Japan
Prior art keywords
vapor deposition
deposition material
gear
shaft
support body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13638086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0538047Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13638086U priority Critical patent/JPH0538047Y2/ja
Publication of JPS6342158U publication Critical patent/JPS6342158U/ja
Application granted granted Critical
Publication of JPH0538047Y2 publication Critical patent/JPH0538047Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP13638086U 1986-09-04 1986-09-04 Expired - Lifetime JPH0538047Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13638086U JPH0538047Y2 (enrdf_load_html_response) 1986-09-04 1986-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13638086U JPH0538047Y2 (enrdf_load_html_response) 1986-09-04 1986-09-04

Publications (2)

Publication Number Publication Date
JPS6342158U true JPS6342158U (enrdf_load_html_response) 1988-03-19
JPH0538047Y2 JPH0538047Y2 (enrdf_load_html_response) 1993-09-27

Family

ID=31039436

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13638086U Expired - Lifetime JPH0538047Y2 (enrdf_load_html_response) 1986-09-04 1986-09-04

Country Status (1)

Country Link
JP (1) JPH0538047Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0538047Y2 (enrdf_load_html_response) 1993-09-27

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