JPS6340684U - - Google Patents

Info

Publication number
JPS6340684U
JPS6340684U JP13531986U JP13531986U JPS6340684U JP S6340684 U JPS6340684 U JP S6340684U JP 13531986 U JP13531986 U JP 13531986U JP 13531986 U JP13531986 U JP 13531986U JP S6340684 U JPS6340684 U JP S6340684U
Authority
JP
Japan
Prior art keywords
actuator
vacuum valve
fluid
driving member
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13531986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03630Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13531986U priority Critical patent/JPH03630Y2/ja
Publication of JPS6340684U publication Critical patent/JPS6340684U/ja
Application granted granted Critical
Publication of JPH03630Y2 publication Critical patent/JPH03630Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Details Of Valves (AREA)
  • Actuator (AREA)
JP13531986U 1986-09-02 1986-09-02 Expired JPH03630Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13531986U JPH03630Y2 (enrdf_load_stackoverflow) 1986-09-02 1986-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13531986U JPH03630Y2 (enrdf_load_stackoverflow) 1986-09-02 1986-09-02

Publications (2)

Publication Number Publication Date
JPS6340684U true JPS6340684U (enrdf_load_stackoverflow) 1988-03-16
JPH03630Y2 JPH03630Y2 (enrdf_load_stackoverflow) 1991-01-10

Family

ID=31037395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13531986U Expired JPH03630Y2 (enrdf_load_stackoverflow) 1986-09-02 1986-09-02

Country Status (1)

Country Link
JP (1) JPH03630Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH03630Y2 (enrdf_load_stackoverflow) 1991-01-10

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