JPS6340684U - - Google Patents

Info

Publication number
JPS6340684U
JPS6340684U JP13531986U JP13531986U JPS6340684U JP S6340684 U JPS6340684 U JP S6340684U JP 13531986 U JP13531986 U JP 13531986U JP 13531986 U JP13531986 U JP 13531986U JP S6340684 U JPS6340684 U JP S6340684U
Authority
JP
Japan
Prior art keywords
actuator
vacuum valve
fluid
driving member
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13531986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03630Y2 (el
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13531986U priority Critical patent/JPH03630Y2/ja
Publication of JPS6340684U publication Critical patent/JPS6340684U/ja
Application granted granted Critical
Publication of JPH03630Y2 publication Critical patent/JPH03630Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
  • Details Of Valves (AREA)
  • Actuator (AREA)
JP13531986U 1986-09-02 1986-09-02 Expired JPH03630Y2 (el)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13531986U JPH03630Y2 (el) 1986-09-02 1986-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13531986U JPH03630Y2 (el) 1986-09-02 1986-09-02

Publications (2)

Publication Number Publication Date
JPS6340684U true JPS6340684U (el) 1988-03-16
JPH03630Y2 JPH03630Y2 (el) 1991-01-10

Family

ID=31037395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13531986U Expired JPH03630Y2 (el) 1986-09-02 1986-09-02

Country Status (1)

Country Link
JP (1) JPH03630Y2 (el)

Also Published As

Publication number Publication date
JPH03630Y2 (el) 1991-01-10

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