JPS6340664U - - Google Patents
Info
- Publication number
- JPS6340664U JPS6340664U JP13296886U JP13296886U JPS6340664U JP S6340664 U JPS6340664 U JP S6340664U JP 13296886 U JP13296886 U JP 13296886U JP 13296886 U JP13296886 U JP 13296886U JP S6340664 U JPS6340664 U JP S6340664U
- Authority
- JP
- Japan
- Prior art keywords
- bypass
- valve
- main valve
- box
- advancing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Lift Valve (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13296886U JPH0235102Y2 (no) | 1986-08-30 | 1986-08-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13296886U JPH0235102Y2 (no) | 1986-08-30 | 1986-08-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6340664U true JPS6340664U (no) | 1988-03-16 |
JPH0235102Y2 JPH0235102Y2 (no) | 1990-09-21 |
Family
ID=31032848
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13296886U Expired JPH0235102Y2 (no) | 1986-08-30 | 1986-08-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0235102Y2 (no) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004044969A1 (ja) * | 2001-05-14 | 2004-05-27 | Tokyo Electron Limited | 弁装置および熱処理装置 |
-
1986
- 1986-08-30 JP JP13296886U patent/JPH0235102Y2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004044969A1 (ja) * | 2001-05-14 | 2004-05-27 | Tokyo Electron Limited | 弁装置および熱処理装置 |
CN100397577C (zh) * | 2001-05-14 | 2008-06-25 | 东京毅力科创株式会社 | 阀装置和热处理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0235102Y2 (no) | 1990-09-21 |