JPS6340664U - - Google Patents

Info

Publication number
JPS6340664U
JPS6340664U JP13296886U JP13296886U JPS6340664U JP S6340664 U JPS6340664 U JP S6340664U JP 13296886 U JP13296886 U JP 13296886U JP 13296886 U JP13296886 U JP 13296886U JP S6340664 U JPS6340664 U JP S6340664U
Authority
JP
Japan
Prior art keywords
bypass
valve
main valve
box
advancing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13296886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235102Y2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13296886U priority Critical patent/JPH0235102Y2/ja
Publication of JPS6340664U publication Critical patent/JPS6340664U/ja
Application granted granted Critical
Publication of JPH0235102Y2 publication Critical patent/JPH0235102Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Valves (AREA)
  • Lift Valve (AREA)
JP13296886U 1986-08-30 1986-08-30 Expired JPH0235102Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13296886U JPH0235102Y2 (ko) 1986-08-30 1986-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13296886U JPH0235102Y2 (ko) 1986-08-30 1986-08-30

Publications (2)

Publication Number Publication Date
JPS6340664U true JPS6340664U (ko) 1988-03-16
JPH0235102Y2 JPH0235102Y2 (ko) 1990-09-21

Family

ID=31032848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13296886U Expired JPH0235102Y2 (ko) 1986-08-30 1986-08-30

Country Status (1)

Country Link
JP (1) JPH0235102Y2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004044969A1 (ja) * 2001-05-14 2004-05-27 Tokyo Electron Limited 弁装置および熱処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004044969A1 (ja) * 2001-05-14 2004-05-27 Tokyo Electron Limited 弁装置および熱処理装置
CN100397577C (zh) * 2001-05-14 2008-06-25 东京毅力科创株式会社 阀装置和热处理装置

Also Published As

Publication number Publication date
JPH0235102Y2 (ko) 1990-09-21

Similar Documents

Publication Publication Date Title
JPS6340664U (ko)
JPS6340665U (ko)
JPS6422874U (ko)
JPS6372615U (ko)
JPH0292179U (ko)
JPS6354900U (ko)
JPS63180364U (ko)
JPS6039764U (ja) エアクリーナの排水装置
JPS6289575U (ko)
JPH0310879U (ko)
JPS63105596U (ko)
JPH01102260U (ko)
JPH031276U (ko)
JPH0247403U (ko)
JPS63185978U (ko)
JPH0390043U (ko)
JPS6296177U (ko)
JPS5814564U (ja) 弁装置
JPH0483241U (ko)
JPS63188375U (ko)
JPH0355034U (ko)
JPS6166695U (ko)
JPS6392872U (ko)
JPS6280806U (ko)
JPS63189866U (ko)