JPS6339954U - - Google Patents

Info

Publication number

JPS6339954U

JPS6339954U JP13235686U JP13235686U JPS6339954U JP S6339954 U JPS6339954 U JP S6339954U JP 13235686 U JP13235686 U JP 13235686U JP 13235686 U JP13235686 U JP 13235686U JP S6339954 U JPS6339954 U JP S6339954U

Authority

JP

Japan

Prior art keywords

layer

insulating film

amorphous silicon

thin film

film transistor

Prior art date

1986-08-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010408 film Substances 0.000 claims description 4
• 239000010409 thin film Substances 0.000 claims description 3
• 229910021417 amorphous silicon Inorganic materials 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 2
• 238000004519 manufacturing process Methods 0.000 description 1
• 229920002120 photoresistant polymer Polymers 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1