JPS6339942U - - Google Patents
Info
- Publication number
- JPS6339942U JPS6339942U JP13452586U JP13452586U JPS6339942U JP S6339942 U JPS6339942 U JP S6339942U JP 13452586 U JP13452586 U JP 13452586U JP 13452586 U JP13452586 U JP 13452586U JP S6339942 U JPS6339942 U JP S6339942U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- mass sensor
- conveys
- absence
- supported
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13452586U JPS6339942U (fr) | 1986-09-01 | 1986-09-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13452586U JPS6339942U (fr) | 1986-09-01 | 1986-09-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6339942U true JPS6339942U (fr) | 1988-03-15 |
Family
ID=31035844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13452586U Pending JPS6339942U (fr) | 1986-09-01 | 1986-09-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339942U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021504969A (ja) * | 2017-11-30 | 2021-02-15 | チャイナ トライアンフ インターナショナル エンジニアリング カンパニー リミテッドＣｈｉｎａ Ｔｒｉｕｍｐｈ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｅｎｇｉｎｅｅｒｉｎｇ Ｃｏ．，Ｌｔｄ． | 密閉チャンバ内での基板位置を判定する方法およびこの方法を実行する装置 |
-
1986
- 1986-09-01 JP JP13452586U patent/JPS6339942U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021504969A (ja) * | 2017-11-30 | 2021-02-15 | チャイナ トライアンフ インターナショナル エンジニアリング カンパニー リミテッドＣｈｉｎａ Ｔｒｉｕｍｐｈ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｅｎｇｉｎｅｅｒｉｎｇ Ｃｏ．，Ｌｔｄ． | 密閉チャンバ内での基板位置を判定する方法およびこの方法を実行する装置 |