JPS6339935U - - Google Patents
Info
- Publication number
- JPS6339935U JPS6339935U JP13376086U JP13376086U JPS6339935U JP S6339935 U JPS6339935 U JP S6339935U JP 13376086 U JP13376086 U JP 13376086U JP 13376086 U JP13376086 U JP 13376086U JP S6339935 U JPS6339935 U JP S6339935U
- Authority
- JP
- Japan
- Prior art keywords
- drive mechanism
- shutter
- metal plate
- lamp
- light irradiator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims 5
- 238000001816 cooling Methods 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986133760U JPH0246046Y2 (ja�@�@) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986133760U JPH0246046Y2 (ja�@�@) | 1986-09-02 | 1986-09-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6339935U true JPS6339935U (ja�@�@) | 1988-03-15 |
| JPH0246046Y2 JPH0246046Y2 (ja�@�@) | 1990-12-05 |
Family
ID=31034368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986133760U Expired JPH0246046Y2 (ja�@�@) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0246046Y2 (ja�@�@) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321324A (en) * | 1976-08-11 | 1978-02-27 | Toyota Motor Corp | Heater for engine intake |
| JPS59196735A (ja) * | 1983-04-20 | 1984-11-08 | Matsushita Electric Ind Co Ltd | 紫外線照射装置 |
| JPS6045247A (ja) * | 1983-05-23 | 1985-03-11 | フユージヨン・セミコンダクター・システムズ | フオトレジストの硬化方法及び硬化装置 |
| JPS6045242A (ja) * | 1983-08-23 | 1985-03-11 | Oki Electric Ind Co Ltd | パターン形成方法 |
-
1986
- 1986-09-02 JP JP1986133760U patent/JPH0246046Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321324A (en) * | 1976-08-11 | 1978-02-27 | Toyota Motor Corp | Heater for engine intake |
| JPS59196735A (ja) * | 1983-04-20 | 1984-11-08 | Matsushita Electric Ind Co Ltd | 紫外線照射装置 |
| JPS6045247A (ja) * | 1983-05-23 | 1985-03-11 | フユージヨン・セミコンダクター・システムズ | フオトレジストの硬化方法及び硬化装置 |
| JPS6045242A (ja) * | 1983-08-23 | 1985-03-11 | Oki Electric Ind Co Ltd | パターン形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0246046Y2 (ja�@�@) | 1990-12-05 |