JPS6339931U - - Google Patents

Info

Publication number
JPS6339931U
JPS6339931U JP13376186U JP13376186U JPS6339931U JP S6339931 U JPS6339931 U JP S6339931U JP 13376186 U JP13376186 U JP 13376186U JP 13376186 U JP13376186 U JP 13376186U JP S6339931 U JPS6339931 U JP S6339931U
Authority
JP
Japan
Prior art keywords
cooling stage
cooling
heat treatment
chamber
treatment chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13376186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13376186U priority Critical patent/JPS6339931U/ja
Publication of JPS6339931U publication Critical patent/JPS6339931U/ja
Pending legal-status Critical Current

Links

JP13376186U 1986-09-02 1986-09-02 Pending JPS6339931U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13376186U JPS6339931U (enrdf_load_stackoverflow) 1986-09-02 1986-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13376186U JPS6339931U (enrdf_load_stackoverflow) 1986-09-02 1986-09-02

Publications (1)

Publication Number Publication Date
JPS6339931U true JPS6339931U (enrdf_load_stackoverflow) 1988-03-15

Family

ID=31034370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13376186U Pending JPS6339931U (enrdf_load_stackoverflow) 1986-09-02 1986-09-02

Country Status (1)

Country Link
JP (1) JPS6339931U (enrdf_load_stackoverflow)

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