JPS6339171U - - Google Patents
Info
- Publication number
- JPS6339171U JPS6339171U JP13179986U JP13179986U JPS6339171U JP S6339171 U JPS6339171 U JP S6339171U JP 13179986 U JP13179986 U JP 13179986U JP 13179986 U JP13179986 U JP 13179986U JP S6339171 U JPS6339171 U JP S6339171U
- Authority
- JP
- Japan
- Prior art keywords
- cores
- magnet
- coil
- core
- outer frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13179986U JPS6339171U (enExample) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13179986U JPS6339171U (enExample) | 1986-08-27 | 1986-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6339171U true JPS6339171U (enExample) | 1988-03-14 |
Family
ID=31030585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13179986U Pending JPS6339171U (enExample) | 1986-08-27 | 1986-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339171U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60163433A (ja) * | 1984-02-03 | 1985-08-26 | Toshiba Corp | プラズマ処理装置 |
-
1986
- 1986-08-27 JP JP13179986U patent/JPS6339171U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60163433A (ja) * | 1984-02-03 | 1985-08-26 | Toshiba Corp | プラズマ処理装置 |