JPS6339168U - - Google Patents
Info
- Publication number
- JPS6339168U JPS6339168U JP13040486U JP13040486U JPS6339168U JP S6339168 U JPS6339168 U JP S6339168U JP 13040486 U JP13040486 U JP 13040486U JP 13040486 U JP13040486 U JP 13040486U JP S6339168 U JPS6339168 U JP S6339168U
- Authority
- JP
- Japan
- Prior art keywords
- machined surface
- workpiece
- holder
- container
- flat plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 238000003754 machining Methods 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 230000000717 retained effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13040486U JPS6339168U (enExample) | 1986-08-26 | 1986-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13040486U JPS6339168U (enExample) | 1986-08-26 | 1986-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6339168U true JPS6339168U (enExample) | 1988-03-14 |
Family
ID=31027870
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13040486U Pending JPS6339168U (enExample) | 1986-08-26 | 1986-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339168U (enExample) |
-
1986
- 1986-08-26 JP JP13040486U patent/JPS6339168U/ja active Pending