JPS6339167U - - Google Patents
Info
- Publication number
- JPS6339167U JPS6339167U JP13182686U JP13182686U JPS6339167U JP S6339167 U JPS6339167 U JP S6339167U JP 13182686 U JP13182686 U JP 13182686U JP 13182686 U JP13182686 U JP 13182686U JP S6339167 U JPS6339167 U JP S6339167U
- Authority
- JP
- Japan
- Prior art keywords
- chemical reaction
- workpiece
- reaction gas
- hollow shaft
- reaction vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 239000012495 reaction gas Substances 0.000 claims description 6
- 238000003756 stirring Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 3
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13182686U JPS6339167U (enExample) | 1986-08-28 | 1986-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13182686U JPS6339167U (enExample) | 1986-08-28 | 1986-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6339167U true JPS6339167U (enExample) | 1988-03-14 |
Family
ID=31030639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13182686U Pending JPS6339167U (enExample) | 1986-08-28 | 1986-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339167U (enExample) |
-
1986
- 1986-08-28 JP JP13182686U patent/JPS6339167U/ja active Pending