JPS6339163U - - Google Patents

Info

Publication number
JPS6339163U
JPS6339163U JP17444986U JP17444986U JPS6339163U JP S6339163 U JPS6339163 U JP S6339163U JP 17444986 U JP17444986 U JP 17444986U JP 17444986 U JP17444986 U JP 17444986U JP S6339163 U JPS6339163 U JP S6339163U
Authority
JP
Japan
Prior art keywords
door
rail
vacuum evaporation
evaporation apparatus
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17444986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17444986U priority Critical patent/JPS6339163U/ja
Publication of JPS6339163U publication Critical patent/JPS6339163U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17444986U 1986-11-13 1986-11-13 Pending JPS6339163U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17444986U JPS6339163U (enrdf_load_stackoverflow) 1986-11-13 1986-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17444986U JPS6339163U (enrdf_load_stackoverflow) 1986-11-13 1986-11-13

Publications (1)

Publication Number Publication Date
JPS6339163U true JPS6339163U (enrdf_load_stackoverflow) 1988-03-14

Family

ID=31112843

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17444986U Pending JPS6339163U (enrdf_load_stackoverflow) 1986-11-13 1986-11-13

Country Status (1)

Country Link
JP (1) JPS6339163U (enrdf_load_stackoverflow)

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