JPS6339163U - - Google Patents
Info
- Publication number
- JPS6339163U JPS6339163U JP17444986U JP17444986U JPS6339163U JP S6339163 U JPS6339163 U JP S6339163U JP 17444986 U JP17444986 U JP 17444986U JP 17444986 U JP17444986 U JP 17444986U JP S6339163 U JPS6339163 U JP S6339163U
- Authority
- JP
- Japan
- Prior art keywords
- door
- rail
- vacuum evaporation
- evaporation apparatus
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17444986U JPS6339163U (OSRAM) | 1986-11-13 | 1986-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17444986U JPS6339163U (OSRAM) | 1986-11-13 | 1986-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6339163U true JPS6339163U (OSRAM) | 1988-03-14 |
Family
ID=31112843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17444986U Pending JPS6339163U (OSRAM) | 1986-11-13 | 1986-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339163U (OSRAM) |
-
1986
- 1986-11-13 JP JP17444986U patent/JPS6339163U/ja active Pending
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