JPS6339160U - - Google Patents
Info
- Publication number
- JPS6339160U JPS6339160U JP12968186U JP12968186U JPS6339160U JP S6339160 U JPS6339160 U JP S6339160U JP 12968186 U JP12968186 U JP 12968186U JP 12968186 U JP12968186 U JP 12968186U JP S6339160 U JPS6339160 U JP S6339160U
- Authority
- JP
- Japan
- Prior art keywords
- door
- rail
- vacuum evaporation
- evaporation apparatus
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12968186U JPS6339160U (enExample) | 1986-08-26 | 1986-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12968186U JPS6339160U (enExample) | 1986-08-26 | 1986-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6339160U true JPS6339160U (enExample) | 1988-03-14 |
Family
ID=31026469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12968186U Pending JPS6339160U (enExample) | 1986-08-26 | 1986-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6339160U (enExample) |
-
1986
- 1986-08-26 JP JP12968186U patent/JPS6339160U/ja active Pending
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