JPS6338574A - Method for preventing exfoliation of lining material of vacuum vessel - Google Patents
Method for preventing exfoliation of lining material of vacuum vesselInfo
- Publication number
- JPS6338574A JPS6338574A JP18314186A JP18314186A JPS6338574A JP S6338574 A JPS6338574 A JP S6338574A JP 18314186 A JP18314186 A JP 18314186A JP 18314186 A JP18314186 A JP 18314186A JP S6338574 A JPS6338574 A JP S6338574A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- lining
- base material
- lining materials
- lining material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 108
- 238000000034 method Methods 0.000 title claims description 8
- 238000004299 exfoliation Methods 0.000 title abstract 2
- 238000003466 welding Methods 0.000 abstract description 19
- 229910000975 Carbon steel Inorganic materials 0.000 abstract description 3
- 239000010962 carbon steel Substances 0.000 abstract description 3
- 239000010953 base metal Substances 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005553 drilling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000011120 plywood Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、真空蒸発装置における蒸発缶のように内部を
大気圧以下の減圧状態にした真空容器において、該容器
の内面に耐蝕性の内張り材をライニングする場合、この
内張り材が容器内の真空によって剥離するのを防止する
方法に関するものである。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a vacuum container, such as an evaporator in a vacuum evaporator, whose interior is in a reduced pressure state below atmospheric pressure. When lining a material, it relates to a method of preventing this lining material from peeling off due to the vacuum inside the container.
一般に腐蝕性の流体を取り扱う真空容器では、当該真空
容器の母材板は鋼板等の比較的安価な材料で構成し、該
母材板の内面に、ステンレス又はチタン等のように耐蝕
性を有する合圧板製の内張り材をライニングすることが
行なわれていることは周知の通りである。Generally, in a vacuum container that handles corrosive fluids, the base material plate of the vacuum container is made of a relatively inexpensive material such as a steel plate, and the inner surface of the base material plate has a corrosion-resistant material such as stainless steel or titanium. It is well known that lining is made of plywood.
そして従来このライニングは、第５図及び第６図に示す
ように真空容器ｌにおける母材板２の内面に、適宜大き
さの内張り材３を複数枚並べて敷設し、該各内張り材３
の全周囲を、母材ｊｅｔ、 ２に対して各内張り材３の
相互間の隙間を埋めるように肉盛り溶接４する一方、前
記各内張り材３には、複数個の穴５を縦方向及び横方向
に適宜間隔で穿設し、各内張り材３を、母材板２に対し
て前記６穴５の部分において当該穴５を埋めるように肉
盛り溶接６する（このように、内張り材３に穴５を穿設
し、この穴５を埋めるように肉盛り溶接６することを栓
溶接又はプラグ切接と言う）ことにより、内張り材３の
工１１離を防止するようにしている。Conventionally, this lining is made by laying a plurality of appropriately sized lining materials 3 side by side on the inner surface of the base material plate 2 of the vacuum vessel l, as shown in FIGS. 5 and 6.
The entire periphery of the lining material 3 is overlay welded 4 to the base material jet 2 so as to fill the gaps between each lining material 3, while a plurality of holes 5 are formed in each lining material 3 in the vertical and vertical directions. Holes are drilled at appropriate intervals in the lateral direction, and each lining material 3 is welded overlay 6 to the base material plate 2 so as to fill the hole 5 at the portion of the six holes 5 (in this way, the lining material 3 Drilling a hole 5 in the hole 5 and performing overlay welding 6 to fill the hole 5 is called plug welding or plug cutting, thereby preventing separation of the lining material 3 from the welding process 11.
この場合、容器１内は真空であるのに対し、内張り材３
と母材板６との隙間は大気圧であるため、内張り材３の
剥離防止には栓溶接の数を増す必要がある。In this case, while the inside of the container 1 is vacuum, the lining material 3
Since the gap between the lining material 3 and the base material plate 6 is at atmospheric pressure, it is necessary to increase the number of plug welds to prevent the lining material 3 from peeling off.
また、内張り材を真空容器における母材板に対して熔接
することができない場合には、真空容器における母材板
の内面に並べて敷設した複数攻の内張り材を、Ｖ；接同
士を熔接にて接合する一方、各内張り材を、縦方向及び
横方向に適宜間隔の箇所において母材板に対してリベッ
ト又はねじにて係止することにより、内張り材３の剥離
を防止するようにしている。In addition, if it is not possible to weld the lining material to the base material plate of the vacuum vessel, multiple lining materials laid side by side on the inner surface of the base material plate of the vacuum vessel may be welded together. While being joined, each lining material is secured to the base plate at appropriate intervals in the vertical and horizontal directions using rivets or screws to prevent the lining material 3 from peeling off.
しかしこのように内張り材３の２（Ｊ ｍを防止するた
めに、当該内張り材３を、母材板２に対して複′！ｊ！
箇所において栓溶接するか、或いはりベント又はねじに
て係止することは、内張り材３に対して、栓溶接用の穴
又はリベット用の穴若しくはねじ用の穴を多数個ドリル
又はパンチにより穿設しなければならないから、これに
多大の手数を要するのである。However, in this way, in order to prevent 2 (J m of the lining material 3, the lining material 3 is attached to the base material board 2).
Plug welding or fixing with vents or screws can be done by drilling or punching multiple holes for plug welding, rivet holes, or screw holes in the lining material 3. This requires a great deal of effort.
しかも、前者の栓溶接を行う場合には、熔接に際して母
材板の成分がまきあがって溶接表面の成分が変化し、例
えば母材板が炭素鋼で、内張り材がステンレス鋼である
とき、炭素鋼の炭素成分がステンレス鋼の溶接表面に析
出し、耐蝕性が低下することになるから、内張り材の板
厚さを厚くシたり、栓溶接を層状に複数回に・分けて行
うようにしなければならないのである。Moreover, when performing the former type of plug welding, the components of the base metal plate are mixed up during welding and the components of the welding surface change. For example, when the base metal plate is carbon steel and the lining material is stainless steel, carbon The carbon components of the steel will precipitate on the welded surface of the stainless steel, reducing its corrosion resistance, so it is necessary to increase the thickness of the lining material and perform plug welding in multiple layers. It must be done.
また、後者のリベット又はねじによる方法も、多数本の
りベントのかしめ付け、ねじ止めに多大の手数を必要と
する上に、リベット又はねじからの漏洩を防止するため
に、複故本のリベット又はねじの頭を内張り材に対して
熔接するようにしなければならないから、多大の手数を
必要とするのである。In addition, the latter method using rivets or screws requires a great deal of effort to caulk and screw a large number of glue vents, and in addition, in order to prevent leakage from the rivets or screws, multiple rivets or screws are required. The head of the screw must be welded to the lining material, which requires a great deal of effort.
その上、前記栓溶接や、リベット又はねし止めによる方
法では、熔接の箇所が多く、溶接欠陥が発生する確率が
増大する点も問題であった。Furthermore, the methods using plug welding, rivets, or screws have a problem in that there are many welded locations, which increases the probability that welding defects will occur.
本発明は、前記のように多大の手数を要する栓溶接や、
リベット止め又はねし止めを無くするか、或いは、栓溶
接や、リベット止め又はねじ止めする数を低減できる内
張り材の剥離防止方法を提供するものである。The present invention is applicable to plug welding, which requires a great deal of effort as described above,
The present invention provides a method for preventing peeling of a lining material, which eliminates riveting or screwing, or reduces the number of plug welding, riveting, or screwing.
このため本発明は、内面に内張り材をライニングした真
空容器において、該真空容器を構成する母材板に、当該
母材板と前記内張り材との隙間に連通ずる開口部を穿設
し、該開口部を、前記真空容器内の真空度以上の真空度
を有する真空系に接続したものである。For this reason, the present invention provides a vacuum container whose inner surface is lined with a lining material, in which a base material plate constituting the vacuum container is provided with an opening that communicates with a gap between the base material plate and the lining material. The opening is connected to a vacuum system having a degree of vacuum greater than the degree of vacuum within the vacuum container.
真空容器内を真空する前において、当該真空容器におけ
る母材板と、その内面にライニングした内張り材との間
の隙間に連通ずる開口部を、例えば真空ポンプ又は蒸気
エゼクタ等の真空系に接続して、前記母材板と内張り材
との間の隙間を、前記真空容器内における真空度よりも
高い真空状態にする。Before evacuating the inside of the vacuum container, the opening that communicates with the gap between the base material plate and the lining material lining the inner surface of the vacuum container is connected to a vacuum system such as a vacuum pump or a steam ejector. Then, the gap between the base material plate and the lining material is brought into a vacuum state higher than the degree of vacuum in the vacuum container.
すると、内張り材が母材板の内面に対して密着すること
になり、この密接状態は、真空容器内が大気圧以下の真
空になった場合においても保持されるから、内張り材が
真空容器内の真空によって剥離するのを防止することが
できる。As a result, the lining material comes into close contact with the inner surface of the base material plate, and this close state is maintained even when the vacuum inside the vacuum container is below atmospheric pressure. The vacuum can prevent it from peeling off.
この場合、前記母材板と内張り材との間の隙間に連通ず
る開口部は、前記隙間を真空にしたあと閉じるようにし
ても良いが、当該開口部から真空系への吸引は、真空容
器内を真空に維持する間中において連続的に又は間欠的
に行うようにしても良い。In this case, the opening communicating with the gap between the base plate and the lining material may be closed after the gap is evacuated, but the suction from the opening to the vacuum system is It may be carried out continuously or intermittently while maintaining the vacuum inside.
従って、本発明によると、直空容器における母材板の内
面にライニングした内張り材を、母材板に対して栓溶接
する数や、リベット止め又はねし止めする数を少な（す
ることができるか、或いは場合によっては栓溶接やリベ
ット止め又はねじ止めを無くすることができるから、ラ
イニングに要するコストを著しく低減できるのである。Therefore, according to the present invention, it is possible to reduce the number of plug welding, riveting or screwing of the lining material lining the inner surface of the base material plate to the base material plate in the direct air container. Alternatively, in some cases plug welding, riveting or screwing can be dispensed with, so that the cost required for the lining can be significantly reduced.
しかも、母材板と内張り材との間の隙間に連通ずる開口
部における真空度の低下によって、内張り材からの漏洩
発生を迅速且つ容易に検知することができて、内張り材
に漏洩が生じていることの発見遅れによる母材板の腐食
を低減できると共に、内張り材のライニング施行後にお
いて、前記開口部から母材板と内張り材との間の隙間に
比較的低圧の空気を吹き込むことによって、内張り材に
おける欠陥箇所を容易に発見することができる効果を有
する。Moreover, the reduction in the degree of vacuum at the opening communicating with the gap between the base plate and the lining material makes it possible to quickly and easily detect the occurrence of leakage from the lining material, and prevent leakage from occurring in the lining material. By blowing relatively low-pressure air into the gap between the base plate and the lining material from the opening after lining the lining material, This has the effect of allowing easy discovery of defective locations in the lining material.
以下本発明の実施例を図面（第１図〜第３図）について
説明すると、図において２は、真空容器１の外殻を構成
する炭素鋼等の母材板、３は、該母材板２の内面にライ
ニングする適宜大きさく例えば、幅５００■１１長さ１
５００龍）のステンレス鋼製内張り材を各々示し、前記
内張り材３は、その複数枚が前記母材板２の内面に並べ
て敷設され、且つ、該各内張り材３の全周囲は、母材板
２に対して各内張り材３の相互間の隙間を埋めるように
肉盛り溶接４されている。そして、前記母材４反２と内
張り材３との間の隙間を符号７で示す。Embodiments of the present invention will be described below with reference to the drawings (FIGS. 1 to 3). In the drawings, 2 is a base material plate made of carbon steel or the like that constitutes the outer shell of the vacuum vessel 1, and 3 is the base material plate. For example, width 500 x 11 length 1.
A plurality of the lining materials 3 are laid side by side on the inner surface of the base material plate 2, and the entire periphery of each lining material 3 is covered with the base material plate. 2 is overlaid by welding 4 so as to fill the gaps between the respective lining materials 3. A gap between the base material 4 and the lining material 3 is indicated by reference numeral 7.
符号８は、前記内張り材３と同じ材料製の蓋板を示し、
該蓋板８は、前記各内張り材３の隣接部において両内張
り材３に対して全周溶接されており、この蓋板８の裏面
の箇所においては内張り材３の母材板２に対する溶接を
省略して通路９を形成することにより、各内張り材３の
各々と母材板２との間の隙間７を、前記Ｍ板８によって
形成した通路９を介して相互に連通ずるように構成する
。Reference numeral 8 indicates a lid plate made of the same material as the lining material 3;
The lid plate 8 is welded all around to both lining materials 3 at adjacent portions of the lining materials 3, and the welding of the lining material 3 to the base metal plate 2 is welded to the base material plate 2 at the back side of the lid plate 8. By omitting the passage 9, the gap 7 between each of the lining materials 3 and the base plate 2 is configured to communicate with each other via the passage 9 formed by the M plate 8. .
そして、前記真空容器１における母材板２には、前記隙
間７に連通ずる開口部１０を設けて、この開口部１０を
、真空ポンプ１１等の真空系に接続することによって、
前記隙間７を、前記真空容器ｌにおける真空度以上の真
空度にする。The base material plate 2 of the vacuum container 1 is provided with an opening 10 that communicates with the gap 7, and this opening 10 is connected to a vacuum system such as a vacuum pump 11.
The gap 7 is made to have a degree of vacuum higher than the degree of vacuum in the vacuum container 1.
このように各内張り材３と母材板との間の隙間７を、真
空容器１内における直空度よりも高い真空にすることに
より、各内張り材３は、前記隙間７の真空によって母材
板２に密着するから、当該各内張り材３の剥離を防止す
ることができるのである。In this way, by making the gap 7 between each lining material 3 and the base material plate a higher vacuum than the degree of straightness in the vacuum container 1, each lining material 3 is Since it is in close contact with the board 2, it is possible to prevent the respective lining materials 3 from peeling off.
第４図は、容器本体１３と、蓋１４とをフランジ１５．
１６にて接合することで構成した真空容器１２の内面に
、チタン等の耐蝕性内張り材を溶接によることな（ライ
ニングした場合の実施例を示すもので、容器本体１３の
内面にライニングした内張り材１７と、及び蓋１４の内
面にライニングした内張り材１８とは共に、前記フラン
ジ１５゜１６の間に挟まれている。FIG. 4 shows the container body 13 and the lid 14 connected to the flange 15.
This is an example in which a corrosion-resistant lining material such as titanium is lined by welding on the inner surface of the vacuum container 12, which is constructed by joining the inner surface of the container body 13. 17 and a lining material 18 lining the inner surface of the lid 14 are sandwiched between the flanges 15 and 16.
そして、容器本体１３及び蓋１４を構成する母材板には
、その内面と各内張り材１７．１８との間の隙間１９．
２０に連通ずる開口部２１．２２を各々設けて、この両
開口部２１．２２を、真空ポンプ２３等の真空系に接続
して、前記隙間１９゜２０を、真空容器１２における真
空度以上の真空度にすることにより、各内張り材１７．
１８が容器本体１３及び盟１４の内面に密着するから、
その剥離を防止できる。The base material plate constituting the container body 13 and lid 14 has gaps 19 between its inner surface and each lining material 17 and 18.
Openings 21 and 22 communicating with the vacuum vessel 12 are provided respectively, and both openings 21 and 22 are connected to a vacuum system such as a vacuum pump 23, so that the gap 19°20 is By creating a degree of vacuum, each lining material 17.
18 is in close contact with the inner surface of the container body 13 and the sleeve 14,
The peeling can be prevented.
なお、本発明は前記実施例の場合に限らず、他の方法に
よって内張り材をライニングする場合にも通用できるこ
とは言うまでもない。It goes without saying that the present invention is applicable not only to the case of the above-mentioned embodiments but also to cases where the lining material is lined by other methods.
第１図乃至第４図は本発明の実施例を示し、第１図は真
空容器の内面の示す平面図、第２図は第１図のｎ−ｎ視
拡大断面図、第３図は第１図の■−ｍ視拡大断面図、第
４図は本発明の他の実施例を示す真空容器の縦断正面図
、第５図及び第６図は従来の方法を示し、第５図は真空
容器の内面の平面図、第６図は第５図のｖｒ−ｖｔ視被
拡大断面図ある。
１．１２・・・・真空容器、２・・・・母材板、３，１
７．１８・・・・内張り材、７，１９．２０・・・・隙
間、１０．２１．２２・・・・開口部、１１．２３・・
・・！１空ポンプ。
特許出願人 株式会社 笹倉機械磨作所区
Ｎ
第４図
手背１浦正書（自発）
昭和６１年 ９月１８日
１、事件の表示
特願昭６１−１８３１４１号
２、発明の名称
真空容器における内張り材の剥離防止方法３、 ？ｌＩ
ｉ正をする者
事件との関係 特 許 出 馴 人住所
大阪市西淀用区御幣島６丁目７番５号
名称 株式会社 笹倉機械製作所４
、ｆ（埋入
住所 ■５３０大阪市北区大神橋
２丁目北１番２１号明 細 書
６、補正の内容1 to 4 show embodiments of the present invention, in which FIG. 1 is a plan view showing the inner surface of a vacuum container, FIG. 2 is an enlarged sectional view taken along line nn of FIG. 1 is an enlarged sectional view taken along the line ■-m in FIG. 1, FIG. 4 is a longitudinal sectional front view of a vacuum container showing another embodiment of the present invention, FIGS. The plan view of the inner surface of the container, FIG. 6, is an enlarged sectional view taken along the vr-vt line in FIG. 5. 1.12...Vacuum container, 2...Base material plate, 3,1
7.18...Lining material, 7,19.20...Gap, 10.21.22...Opening, 11.23...
...! 1 empty pump. Patent Applicant: Sasakura Machinery Co., Ltd., Ku N Figure 4: Tese 1 Masaaki Ura (spontaneous) September 18, 1985 1. Indication of the incident Patent Application No. 183141/1983 2. Name of the invention In a vacuum container How to prevent lining material from peeling 3.? lI
Relationship with cases of persons who commit i-correction Patent issue Address of acquaintance
6-7-5 Goheijima, Nishiyodo-ku, Osaka City Name Sasakura Machinery Co., Ltd. 4
, f (Installation address ■530 2-1-21 Ogamibashi Kita-ku, Kita-ku, Osaka-shi Specification Form 6, Contents of amendment
Claims (1)
いて、該真空容器を構成する母材板に、当該母材板と前
記内張り材との隙間に連通する開口部を穿設し、該開口
部を、前記真空容器内の真空度以上の真空度を有する真
空系に接続したことを特徴とする真空容器における内張
り材の剥離防止方法。(1) In a vacuum container whose inner surface is lined with a lining material, an opening that communicates with a gap between the base material plate and the lining material is bored in a base material plate constituting the vacuum container, and the opening A method for preventing peeling of a lining material in a vacuum container, characterized in that: is connected to a vacuum system having a degree of vacuum higher than the degree of vacuum in the vacuum container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18314186A JPS6338574A (en) | 1986-08-04 | 1986-08-04 | Method for preventing exfoliation of lining material of vacuum vessel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18314186A JPS6338574A (en) | 1986-08-04 | 1986-08-04 | Method for preventing exfoliation of lining material of vacuum vessel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6338574A true JPS6338574A (en) | 1988-02-19 |
Family
ID=16130519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18314186A Pending JPS6338574A (en) | 1986-08-04 | 1986-08-04 | Method for preventing exfoliation of lining material of vacuum vessel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6338574A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0639087A (en) * | 1992-02-20 | 1994-02-15 | Takasago Denki Sangyo Kk | Slot machine |
| US6933907B2 (en) | 2003-04-02 | 2005-08-23 | Dx Antenna Company, Limited | Variable directivity antenna and variable directivity antenna system using such antennas |
| JP2011146624A (en) * | 2010-01-18 | 2011-07-28 | Ulvac Japan Ltd | Vacuum chamber, vacuum processing apparatus, and method of manufacturing vacuum chamber |
| JP2014172042A (en) * | 2013-03-08 | 2014-09-22 | Tantec Gmbh | Reactor |
| JP2016538730A (en) * | 2013-09-10 | 2016-12-08 | テラセミコン コーポレイション | Chamber of heat treatment apparatus and manufacturing method thereof |
-
1986
- 1986-08-04 JP JP18314186A patent/JPS6338574A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0639087A (en) * | 1992-02-20 | 1994-02-15 | Takasago Denki Sangyo Kk | Slot machine |
| US6933907B2 (en) | 2003-04-02 | 2005-08-23 | Dx Antenna Company, Limited | Variable directivity antenna and variable directivity antenna system using such antennas |
| US7084829B2 (en) | 2003-04-02 | 2006-08-01 | Dx Antenna Company, Limited | Signal receiving system |
| JP2011146624A (en) * | 2010-01-18 | 2011-07-28 | Ulvac Japan Ltd | Vacuum chamber, vacuum processing apparatus, and method of manufacturing vacuum chamber |
| JP2014172042A (en) * | 2013-03-08 | 2014-09-22 | Tantec Gmbh | Reactor |
| US9457332B2 (en) | 2013-03-08 | 2016-10-04 | Tantec Gmbh | Reactor |
| JP2016538730A (en) * | 2013-09-10 | 2016-12-08 | テラセミコン コーポレイション | Chamber of heat treatment apparatus and manufacturing method thereof |
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