JPS6338332U - - Google Patents
Info
- Publication number
- JPS6338332U JPS6338332U JP13198886U JP13198886U JPS6338332U JP S6338332 U JPS6338332 U JP S6338332U JP 13198886 U JP13198886 U JP 13198886U JP 13198886 U JP13198886 U JP 13198886U JP S6338332 U JPS6338332 U JP S6338332U
- Authority
- JP
- Japan
- Prior art keywords
- dicing
- semiconductor wafer
- rotary
- dicing saw
- saw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000008367 deionised water Substances 0.000 claims 1
- 229910021641 deionized water Inorganic materials 0.000 claims 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13198886U JPS6338332U (OSRAM) | 1986-08-28 | 1986-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13198886U JPS6338332U (OSRAM) | 1986-08-28 | 1986-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6338332U true JPS6338332U (OSRAM) | 1988-03-11 |
Family
ID=31030954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13198886U Pending JPS6338332U (OSRAM) | 1986-08-28 | 1986-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6338332U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021030400A (ja) * | 2019-08-28 | 2021-03-01 | 株式会社ディスコ | 測定治具と水圧分布の測定方法 |
-
1986
- 1986-08-28 JP JP13198886U patent/JPS6338332U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021030400A (ja) * | 2019-08-28 | 2021-03-01 | 株式会社ディスコ | 測定治具と水圧分布の測定方法 |