JPS6338315U - - Google Patents
Info
- Publication number
- JPS6338315U JPS6338315U JP13180086U JP13180086U JPS6338315U JP S6338315 U JPS6338315 U JP S6338315U JP 13180086 U JP13180086 U JP 13180086U JP 13180086 U JP13180086 U JP 13180086U JP S6338315 U JPS6338315 U JP S6338315U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- shield
- substrate
- plasma
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13180086U JPS6338315U (cs) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13180086U JPS6338315U (cs) | 1986-08-27 | 1986-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6338315U true JPS6338315U (cs) | 1988-03-11 |
Family
ID=31030587
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13180086U Pending JPS6338315U (cs) | 1986-08-27 | 1986-08-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6338315U (cs) |
-
1986
- 1986-08-27 JP JP13180086U patent/JPS6338315U/ja active Pending