JPS6338246U - - Google Patents
Info
- Publication number
- JPS6338246U JPS6338246U JP13108386U JP13108386U JPS6338246U JP S6338246 U JPS6338246 U JP S6338246U JP 13108386 U JP13108386 U JP 13108386U JP 13108386 U JP13108386 U JP 13108386U JP S6338246 U JPS6338246 U JP S6338246U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding
- electron microscope
- scanning electron
- sample stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13108386U JPS6338246U (cs) | 1986-08-29 | 1986-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13108386U JPS6338246U (cs) | 1986-08-29 | 1986-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6338246U true JPS6338246U (cs) | 1988-03-11 |
Family
ID=31029199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13108386U Pending JPS6338246U (cs) | 1986-08-29 | 1986-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6338246U (cs) |
-
1986
- 1986-08-29 JP JP13108386U patent/JPS6338246U/ja active Pending