JPS6336042U - - Google Patents
Info
- Publication number
- JPS6336042U JPS6336042U JP12714586U JP12714586U JPS6336042U JP S6336042 U JPS6336042 U JP S6336042U JP 12714586 U JP12714586 U JP 12714586U JP 12714586 U JP12714586 U JP 12714586U JP S6336042 U JPS6336042 U JP S6336042U
- Authority
- JP
- Japan
- Prior art keywords
- mounting table
- wafer mounting
- supporting substrate
- opening
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000000523 sample Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims 3
Landscapes
- Measuring Leads Or Probes (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12714586U JPS6336042U (pt) | 1986-08-22 | 1986-08-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12714586U JPS6336042U (pt) | 1986-08-22 | 1986-08-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6336042U true JPS6336042U (pt) | 1988-03-08 |
Family
ID=31021616
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12714586U Pending JPS6336042U (pt) | 1986-08-22 | 1986-08-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6336042U (pt) |
-
1986
- 1986-08-22 JP JP12714586U patent/JPS6336042U/ja active Pending