JPS6336033U - - Google Patents

Info

Publication number
JPS6336033U
JPS6336033U JP12711686U JP12711686U JPS6336033U JP S6336033 U JPS6336033 U JP S6336033U JP 12711686 U JP12711686 U JP 12711686U JP 12711686 U JP12711686 U JP 12711686U JP S6336033 U JPS6336033 U JP S6336033U
Authority
JP
Japan
Prior art keywords
mark
alignment
alignment mark
dimensions
marks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12711686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12711686U priority Critical patent/JPS6336033U/ja
Publication of JPS6336033U publication Critical patent/JPS6336033U/ja
Pending legal-status Critical Current

Links

JP12711686U 1986-08-22 1986-08-22 Pending JPS6336033U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12711686U JPS6336033U (US06815460-20041109-C00097.png) 1986-08-22 1986-08-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12711686U JPS6336033U (US06815460-20041109-C00097.png) 1986-08-22 1986-08-22

Publications (1)

Publication Number Publication Date
JPS6336033U true JPS6336033U (US06815460-20041109-C00097.png) 1988-03-08

Family

ID=31021558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12711686U Pending JPS6336033U (US06815460-20041109-C00097.png) 1986-08-22 1986-08-22

Country Status (1)

Country Link
JP (1) JPS6336033U (US06815460-20041109-C00097.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612745A (en) * 1979-07-10 1981-02-07 Nec Corp Production of semiconductor device
JPS57112021A (en) * 1980-12-29 1982-07-12 Fujitsu Ltd Manufacture of semiconductor device
JPS59188648A (ja) * 1983-04-11 1984-10-26 Oki Electric Ind Co Ltd マスク合せキ−

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5612745A (en) * 1979-07-10 1981-02-07 Nec Corp Production of semiconductor device
JPS57112021A (en) * 1980-12-29 1982-07-12 Fujitsu Ltd Manufacture of semiconductor device
JPS59188648A (ja) * 1983-04-11 1984-10-26 Oki Electric Ind Co Ltd マスク合せキ−

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