JPS6335921U - - Google Patents
Info
- Publication number
- JPS6335921U JPS6335921U JP12960286U JP12960286U JPS6335921U JP S6335921 U JPS6335921 U JP S6335921U JP 12960286 U JP12960286 U JP 12960286U JP 12960286 U JP12960286 U JP 12960286U JP S6335921 U JPS6335921 U JP S6335921U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- intake air
- film resistor
- plate substrate
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000003054 catalyst Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 230000001681 protective effect Effects 0.000 claims 2
- 238000002485 combustion reaction Methods 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Description
第1図は本考案による吸入空気量制御装置の側
面図、第2図は第1図の―線に沿つてみた拡
大断面図、第3図は検出回路図、第4図は別の実
施例を示す流速検出素子の正面図、第5図は更に
別の実施例を示す流速検出素子の正面図である。
1……吸気通路、3……流速検出素子、6……
薄板基板、7……薄膜抵抗体、13……保護層、
15,16,17……触媒薄膜。
Fig. 1 is a side view of the intake air amount control device according to the present invention, Fig. 2 is an enlarged sectional view taken along the line - in Fig. 1, Fig. 3 is a detection circuit diagram, and Fig. 4 is another embodiment. FIG. 5 is a front view of a flow velocity detection element showing still another embodiment. 1...Intake passage, 3...Flow velocity detection element, 6...
Thin plate substrate, 7... Thin film resistor, 13... Protective layer,
15, 16, 17...Catalyst thin film.
Claims (1)
該薄膜抵抗体を保護膜により覆い、該薄板基板を
吸入空気流路内に配置して該薄膜抵抗体を加熱す
ることにより吸入空気流速を検出するようにした
吸入空気量検出装置において、上記薄膜抵抗体周
りの薄板基板表面周辺部の保護膜上に白金を主成
分とする触媒薄膜を形成した内燃機関の吸入空気
量検出装置。 A thin film resistor is formed on the surface of a thin plate substrate, the thin film resistor is covered with a protective film, the thin plate substrate is placed in an intake air flow path, and the thin film resistor is heated to detect the intake air flow velocity. The intake air amount detection device for an internal combustion engine, wherein a catalyst thin film containing platinum as a main component is formed on a protective film around the surface of the thin plate substrate around the thin film resistor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12960286U JPS6335921U (en) | 1986-08-27 | 1986-08-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12960286U JPS6335921U (en) | 1986-08-27 | 1986-08-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6335921U true JPS6335921U (en) | 1988-03-08 |
Family
ID=31026320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12960286U Pending JPS6335921U (en) | 1986-08-27 | 1986-08-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6335921U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02307019A (en) * | 1989-05-22 | 1990-12-20 | Stec Kk | Flow sensor |
-
1986
- 1986-08-27 JP JP12960286U patent/JPS6335921U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02307019A (en) * | 1989-05-22 | 1990-12-20 | Stec Kk | Flow sensor |
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