JPS633571U - - Google Patents
Info
- Publication number
- JPS633571U JPS633571U JP9687886U JP9687886U JPS633571U JP S633571 U JPS633571 U JP S633571U JP 9687886 U JP9687886 U JP 9687886U JP 9687886 U JP9687886 U JP 9687886U JP S633571 U JPS633571 U JP S633571U
- Authority
- JP
- Japan
- Prior art keywords
- pressure control
- control device
- rotary blades
- pressure
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lift Valve (AREA)
Description
第１図は本考案の一実施例の外観図、第２図は
実効コンダクタンスーバルブ開度特性の一例であ
る。
図において、１，２，３……回転翼、４，５，
６，７……ギア、８……モータ。
FIG. 1 is an external view of an embodiment of the present invention, and FIG. 2 is an example of effective conductance and valve opening characteristics. In the figure, 1, 2, 3...rotor blades, 4, 5,
6, 7...Gear, 8...Motor.
Claims (1)
を有するバタフライ・バルブの開閉によつて前記
真空装置内の圧力を制御する圧力制御装置におい
て、同心円状に分割区分されて単独もしくは所定
の組合せにおいて動作する複数の回転翼を備える
ことを特徴とする圧力制御装置。 A pressure control device that is installed between a vacuum device and an exhaust device and controls the pressure within the vacuum device by opening and closing a butterfly valve having rotary blades, which is divided into concentric circles and used singly or in a predetermined combination. 1. A pressure control device comprising a plurality of rotary blades operating in a pressure control device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9687886U JPS633571U (en) | 1986-06-24 | 1986-06-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9687886U JPS633571U (en) | 1986-06-24 | 1986-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS633571U true JPS633571U (en) | 1988-01-11 |
Family
ID=30963157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9687886U Pending JPS633571U (en) | 1986-06-24 | 1986-06-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633571U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6127374A (en) * | 1984-07-17 | 1986-02-06 | Akira Oshima | Double spindle butterfly valve |
-
1986
- 1986-06-24 JP JP9687886U patent/JPS633571U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6127374A (en) * | 1984-07-17 | 1986-02-06 | Akira Oshima | Double spindle butterfly valve |