JPS6334942U - - Google Patents
Info
- Publication number
- JPS6334942U JPS6334942U JP12869586U JP12869586U JPS6334942U JP S6334942 U JPS6334942 U JP S6334942U JP 12869586 U JP12869586 U JP 12869586U JP 12869586 U JP12869586 U JP 12869586U JP S6334942 U JPS6334942 U JP S6334942U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- transport mechanism
- suction port
- bag
- conveyance device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007723 transport mechanism Effects 0.000 claims 2
- 239000000428 dust Substances 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
Description
第１図は本考案の一実施例を示すクリーンルー
ム用搬送装置の一部を切り欠いた側面図、第２図
は同上背面図である。
１……搬送機構、２……アクチユエータ、３…
…被覆体、８……吸込み口体。
FIG. 1 is a partially cutaway side view of a clean room conveyance device showing an embodiment of the present invention, and FIG. 2 is a rear view of the same. 1... Conveyance mechanism, 2... Actuator, 3...
...Covering body, 8... Suction port body.
Claims (1)
搬送機構のアクチユエータ部分のみを露出させて
静電気帯電防止処理されている防塵用素材にて形
成した袋状被覆体にて密封被覆し、この被覆体に
この被覆体内の塵を含んだ空気を除去する吸込み
口体を設けたことを特徴とするクリーンルーム用
搬送装置。 A transport mechanism installed in a clean room is hermetically covered with a bag-shaped covering made of a dustproof material treated to prevent static electricity, with only the actuator portion of the transport mechanism exposed. A clean room conveyance device characterized by being provided with a suction port for removing air containing dust from inside the body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12869586U JPS6334942U (en) | 1986-08-23 | 1986-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12869586U JPS6334942U (en) | 1986-08-23 | 1986-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6334942U true JPS6334942U (en) | 1988-03-07 |
Family
ID=31024593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12869586U Pending JPS6334942U (en) | 1986-08-23 | 1986-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6334942U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS597057B2 (en) * | 1979-08-01 | 1984-02-16 | 本田技研工業株式会社 | Vehicle hydraulic shock absorber |
| JPS5924292B2 (en) * | 1976-10-15 | 1984-06-08 | カヤバ工業株式会社 | Vehicle height adjustable shock absorber |
| JPS61136790A (en) * | 1984-12-04 | 1986-06-24 | 川崎重工業株式会社 | Robot for clean room |
-
1986
- 1986-08-23 JP JP12869586U patent/JPS6334942U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5924292B2 (en) * | 1976-10-15 | 1984-06-08 | カヤバ工業株式会社 | Vehicle height adjustable shock absorber |
| JPS597057B2 (en) * | 1979-08-01 | 1984-02-16 | 本田技研工業株式会社 | Vehicle hydraulic shock absorber |
| JPS61136790A (en) * | 1984-12-04 | 1986-06-24 | 川崎重工業株式会社 | Robot for clean room |