JPS6333627U - - Google Patents
Info
- Publication number
- JPS6333627U JPS6333627U JP12688786U JP12688786U JPS6333627U JP S6333627 U JPS6333627 U JP S6333627U JP 12688786 U JP12688786 U JP 12688786U JP 12688786 U JP12688786 U JP 12688786U JP S6333627 U JPS6333627 U JP S6333627U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- back side
- nozzle
- dry
- holding plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims description 2
- 238000005507 spraying Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12688786U JPS6333627U (zh) | 1986-08-19 | 1986-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12688786U JPS6333627U (zh) | 1986-08-19 | 1986-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6333627U true JPS6333627U (zh) | 1988-03-04 |
Family
ID=31021117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12688786U Pending JPS6333627U (zh) | 1986-08-19 | 1986-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6333627U (zh) |
-
1986
- 1986-08-19 JP JP12688786U patent/JPS6333627U/ja active Pending