JPS6333624U - - Google Patents
Info
- Publication number
- JPS6333624U JPS6333624U JP12688886U JP12688886U JPS6333624U JP S6333624 U JPS6333624 U JP S6333624U JP 12688886 U JP12688886 U JP 12688886U JP 12688886 U JP12688886 U JP 12688886U JP S6333624 U JPS6333624 U JP S6333624U
- Authority
- JP
- Japan
- Prior art keywords
- quartz boat
- heat treatment
- protective film
- polycrystalline silicon
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12688886U JPS6333624U (fi) | 1986-08-19 | 1986-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12688886U JPS6333624U (fi) | 1986-08-19 | 1986-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6333624U true JPS6333624U (fi) | 1988-03-04 |
Family
ID=31021119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12688886U Pending JPS6333624U (fi) | 1986-08-19 | 1986-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6333624U (fi) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013201203A (ja) * | 2012-03-23 | 2013-10-03 | Tokyo Electron Ltd | 成膜装置のパーツ保護方法および成膜方法 |
-
1986
- 1986-08-19 JP JP12688886U patent/JPS6333624U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013201203A (ja) * | 2012-03-23 | 2013-10-03 | Tokyo Electron Ltd | 成膜装置のパーツ保護方法および成膜方法 |