JPS6333406U - - Google Patents

Info

Publication number
JPS6333406U
JPS6333406U JP12752486U JP12752486U JPS6333406U JP S6333406 U JPS6333406 U JP S6333406U JP 12752486 U JP12752486 U JP 12752486U JP 12752486 U JP12752486 U JP 12752486U JP S6333406 U JPS6333406 U JP S6333406U
Authority
JP
Japan
Prior art keywords
measured
detector
film thickness
light
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12752486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429364Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986127524U priority Critical patent/JPH0429364Y2/ja
Publication of JPS6333406U publication Critical patent/JPS6333406U/ja
Application granted granted Critical
Publication of JPH0429364Y2 publication Critical patent/JPH0429364Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1986127524U 1986-08-21 1986-08-21 Expired JPH0429364Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986127524U JPH0429364Y2 (enrdf_load_stackoverflow) 1986-08-21 1986-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986127524U JPH0429364Y2 (enrdf_load_stackoverflow) 1986-08-21 1986-08-21

Publications (2)

Publication Number Publication Date
JPS6333406U true JPS6333406U (enrdf_load_stackoverflow) 1988-03-03
JPH0429364Y2 JPH0429364Y2 (enrdf_load_stackoverflow) 1992-07-16

Family

ID=31022358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986127524U Expired JPH0429364Y2 (enrdf_load_stackoverflow) 1986-08-21 1986-08-21

Country Status (1)

Country Link
JP (1) JPH0429364Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752807A (en) * 1980-09-17 1982-03-29 Ricoh Co Ltd Device for measuring film thickness

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752807A (en) * 1980-09-17 1982-03-29 Ricoh Co Ltd Device for measuring film thickness

Also Published As

Publication number Publication date
JPH0429364Y2 (enrdf_load_stackoverflow) 1992-07-16

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