JPS6333154U - - Google Patents

Info

Publication number
JPS6333154U
JPS6333154U JP1986125906U JP12590686U JPS6333154U JP S6333154 U JPS6333154 U JP S6333154U JP 1986125906 U JP1986125906 U JP 1986125906U JP 12590686 U JP12590686 U JP 12590686U JP S6333154 U JPS6333154 U JP S6333154U
Authority
JP
Japan
Prior art keywords
pellicle
mask substrate
pellicle frame
pericles
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986125906U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986125906U priority Critical patent/JPS6333154U/ja
Publication of JPS6333154U publication Critical patent/JPS6333154U/ja
Pending legal-status Critical Current

Links

JP1986125906U 1986-08-20 1986-08-20 Pending JPS6333154U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986125906U JPS6333154U (US20030199744A1-20031023-C00003.png) 1986-08-20 1986-08-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986125906U JPS6333154U (US20030199744A1-20031023-C00003.png) 1986-08-20 1986-08-20

Publications (1)

Publication Number Publication Date
JPS6333154U true JPS6333154U (US20030199744A1-20031023-C00003.png) 1988-03-03

Family

ID=31019212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986125906U Pending JPS6333154U (US20030199744A1-20031023-C00003.png) 1986-08-20 1986-08-20

Country Status (1)

Country Link
JP (1) JPS6333154U (US20030199744A1-20031023-C00003.png)

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