JPS6331746U - - Google Patents
Info
- Publication number
- JPS6331746U JPS6331746U JP12594286U JP12594286U JPS6331746U JP S6331746 U JPS6331746 U JP S6331746U JP 12594286 U JP12594286 U JP 12594286U JP 12594286 U JP12594286 U JP 12594286U JP S6331746 U JPS6331746 U JP S6331746U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- processing
- handling
- space
- treatment chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
Landscapes
- Threshing Machine Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12594286U JPS6331746U (zh) | 1986-08-18 | 1986-08-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12594286U JPS6331746U (zh) | 1986-08-18 | 1986-08-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6331746U true JPS6331746U (zh) | 1988-03-01 |
Family
ID=31019283
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12594286U Pending JPS6331746U (zh) | 1986-08-18 | 1986-08-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6331746U (zh) |
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1986
- 1986-08-18 JP JP12594286U patent/JPS6331746U/ja active Pending