JPS633155Y2 - - Google Patents
Info
- Publication number
- JPS633155Y2 JPS633155Y2 JP1987035255U JP3525587U JPS633155Y2 JP S633155 Y2 JPS633155 Y2 JP S633155Y2 JP 1987035255 U JP1987035255 U JP 1987035255U JP 3525587 U JP3525587 U JP 3525587U JP S633155 Y2 JPS633155 Y2 JP S633155Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder
- container
- wafer holder
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 18
- 238000002791 soaking Methods 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 57
- 238000009792 diffusion process Methods 0.000 description 10
- 239000010453 quartz Substances 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 238000000034 method Methods 0.000 description 6
- 239000010419 fine particle Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987035255U JPS633155Y2 (US07943777-20110517-C00090.png) | 1987-03-12 | 1987-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987035255U JPS633155Y2 (US07943777-20110517-C00090.png) | 1987-03-12 | 1987-03-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62147332U JPS62147332U (US07943777-20110517-C00090.png) | 1987-09-17 |
| JPS633155Y2 true JPS633155Y2 (US07943777-20110517-C00090.png) | 1988-01-26 |
Family
ID=30844578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987035255U Expired JPS633155Y2 (US07943777-20110517-C00090.png) | 1987-03-12 | 1987-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS633155Y2 (US07943777-20110517-C00090.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0622980Y2 (ja) * | 1988-09-28 | 1994-06-15 | 日本エー・エス・エム株式会社 | Ｃｖｄ装置における基板支持装置 |
| JPH06818Y2 (ja) * | 1989-09-21 | 1994-01-05 | 日本エー・エス・エム株式会社 | Ｃｖｄ装置のための基板支持装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5351187A (en) * | 1976-10-20 | 1978-05-10 | Matsushita Electric Ind Co Ltd | Gas phase chemical evaporation apparatus |
-
1987
- 1987-03-12 JP JP1987035255U patent/JPS633155Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5351187A (en) * | 1976-10-20 | 1978-05-10 | Matsushita Electric Ind Co Ltd | Gas phase chemical evaporation apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62147332U (US07943777-20110517-C00090.png) | 1987-09-17 |
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