JPS6331535U - - Google Patents

Info

Publication number
JPS6331535U
JPS6331535U JP12470486U JP12470486U JPS6331535U JP S6331535 U JPS6331535 U JP S6331535U JP 12470486 U JP12470486 U JP 12470486U JP 12470486 U JP12470486 U JP 12470486U JP S6331535 U JPS6331535 U JP S6331535U
Authority
JP
Japan
Prior art keywords
wafer
rotary table
processing surface
semiconductor
manufacturing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12470486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12470486U priority Critical patent/JPS6331535U/ja
Publication of JPS6331535U publication Critical patent/JPS6331535U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP12470486U 1986-08-14 1986-08-14 Pending JPS6331535U (US07166745-20070123-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12470486U JPS6331535U (US07166745-20070123-C00016.png) 1986-08-14 1986-08-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12470486U JPS6331535U (US07166745-20070123-C00016.png) 1986-08-14 1986-08-14

Publications (1)

Publication Number Publication Date
JPS6331535U true JPS6331535U (US07166745-20070123-C00016.png) 1988-03-01

Family

ID=31016965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12470486U Pending JPS6331535U (US07166745-20070123-C00016.png) 1986-08-14 1986-08-14

Country Status (1)

Country Link
JP (1) JPS6331535U (US07166745-20070123-C00016.png)

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