JPS6331530U - - Google Patents
Info
- Publication number
- JPS6331530U JPS6331530U JP12496486U JP12496486U JPS6331530U JP S6331530 U JPS6331530 U JP S6331530U JP 12496486 U JP12496486 U JP 12496486U JP 12496486 U JP12496486 U JP 12496486U JP S6331530 U JPS6331530 U JP S6331530U
- Authority
- JP
- Japan
- Prior art keywords
- waveform
- quartz tube
- amplitude
- wavelength
- longitudinal direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Glass Melting And Manufacturing (AREA)
Description
第1図は本考案の一実施例による石英管の長き
方向の部分断面図である。 1……石英管、2……軸、3……軸断面、4…
…外表面、5……凸部、6……凹部、A……振幅
、B……波長。
方向の部分断面図である。 1……石英管、2……軸、3……軸断面、4…
…外表面、5……凸部、6……凹部、A……振幅
、B……波長。
Claims (1)
- 半導体工業に使用される石英管であつて、長さ
方向の軸断面の少なくとも外表面が波形をなし、
前記波形の弧は凸部が凹部より大きな曲率をもち
、前記波形の振幅が10〜50μmで、波長が1
〜10mmであることを特徴とする石英管。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12496486U JPS6331530U (ja) | 1986-08-14 | 1986-08-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12496486U JPS6331530U (ja) | 1986-08-14 | 1986-08-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6331530U true JPS6331530U (ja) | 1988-03-01 |
Family
ID=31017448
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12496486U Pending JPS6331530U (ja) | 1986-08-14 | 1986-08-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6331530U (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01162234U (ja) * | 1988-04-26 | 1989-11-10 |
-
1986
- 1986-08-14 JP JP12496486U patent/JPS6331530U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01162234U (ja) * | 1988-04-26 | 1989-11-10 |