JPS6331528U - - Google Patents

Info

Publication number

JPS6331528U

JPS6331528U JP12525286U JP12525286U JPS6331528U JP S6331528 U JPS6331528 U JP S6331528U JP 12525286 U JP12525286 U JP 12525286U JP 12525286 U JP12525286 U JP 12525286U JP S6331528 U JPS6331528 U JP S6331528U

Authority

JP

Japan

Prior art keywords

heat treatment

sliding parts

rails

grooves

longitudinal direction

Prior art date

1986-08-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 7
• 239000004065 semiconductor Substances 0.000 claims description 4
• 235000012431 wafers Nutrition 0.000 claims 1
• 239000010453 quartz Substances 0.000 description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2