JPS63314500A - X-ray window - Google Patents
X-ray windowInfo
- Publication number
- JPS63314500A JPS63314500A JP15183687A JP15183687A JPS63314500A JP S63314500 A JPS63314500 A JP S63314500A JP 15183687 A JP15183687 A JP 15183687A JP 15183687 A JP15183687 A JP 15183687A JP S63314500 A JPS63314500 A JP S63314500A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- foil
- ray transmitting
- window
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 21
- 239000011888 foil Substances 0.000 claims abstract description 20
- 239000002184 metal Substances 0.000 claims description 12
- 238000001015 X-ray lithography Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
【発明の詳細な説明】 ［産業上の利用分野］ 本発明はＸ線を扱う技術９蝉におけるＸ線窓に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to an X-ray window in a technology for handling X-rays.
［従来の技術］
近年、Ｘ線を利用する産業分野が急速に広がってきてい
る。Ｘ線技術の中での一つの技術的問題点は、Ｘ線窓で
ある。特に薄いＸ線透過箔を使用するＸ線リソグラフィ
においては、信頼性の高いＸ線窓は得られていない。第
２図に従来のＸ線窓の一例を示す。Ｘ線透過領域１をく
り俵いた″金属基板２上に、Ｘ線透過領域１の開口を覆
ってその口縁４に薄いＸ線透過箔３をろう付けしたもの
であった。[Prior Art] In recent years, industrial fields that utilize X-rays have been rapidly expanding. One technical problem within x-ray technology is the x-ray window. Especially in X-ray lithography using thin X-ray transparent foils, reliable X-ray windows are not available. FIG. 2 shows an example of a conventional X-ray window. A thin X-ray transmitting foil 3 was brazed to the edge 4 of the X-ray transmitting region 1, covering the opening of the X-ray transmitting region 1, on a metal substrate 2 formed by hollowing out the X-ray transmitting region 1.
［発明が解決しようとする問題点］
ところでＸｔａリソグラフィでは、Ｘ線透過箔として通
常１０〜２５問厚のＢｅ箔が用いられているが、Ｂｅ箔
の膜厚がかなり薄いため、金属基板へのろう付けでは固
定の信頼性が極めて低い。[Problems to be Solved by the Invention] By the way, in Xta lithography, Be foil with a thickness of 10 to 25 layers is usually used as the X-ray transparent foil, but since the film thickness of Be foil is quite thin, it is difficult to attach it to a metal substrate. Brazing has extremely low fixation reliability.
本発明の目的はこのような従来の問題点を解消して信頼
性の高いＸ線窓を提供することにある。An object of the present invention is to solve these conventional problems and provide a highly reliable X-ray window.
［問題点を解決するための手段］
本発明はＸ線透過領域を開口した金属基板と、Ｘ線透過
領域に臨ませて該金属基板に重ね合せたＸ４Ｉ透過箔と
、該Ｘ線透過箔の周縁を押えて金属基板に定着させる押
え板とを有することを特徴とするＸ線窓である。[Means for Solving the Problems] The present invention comprises a metal substrate with an open X-ray transparent area, an X4I transparent foil stacked on the metal substrate so as to face the X-ray transparent area, and a metal substrate of the X-ray transparent foil. This is an X-ray window characterized by having a presser plate that presses the periphery and fixes the window to a metal substrate.
［実施例］
以下本発明の実施例について、図面を参照しながら説明
する。第１図は本発明の一実施例におけるＸ線窓の模式
図である。図において、Ｘ線透過領域１１をくり扱いた
金属基板１２上にＸ線透過領域１１の開口を覆ってＸ線
透過箔１３を置き、その表面にＸ線透過領域となる窓孔
１４を有する押え板１５をあてがい、Ｘ線透過箔１３の
周縁を押え、該押え板１５をねじ１６などを用いて基板
１２に定着する。[Examples] Examples of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram of an X-ray window in one embodiment of the present invention. In the figure, an X-ray transmitting foil 13 is placed on a metal substrate 12 in which an X-ray transmitting region 11 is cut out, covering the opening of the X-ray transmitting region 11, and a presser foot having a window hole 14 serving as an X-ray transmitting region on its surface. A plate 15 is applied to press the periphery of the X-ray transparent foil 13, and the press plate 15 is fixed to the substrate 12 using screws 16 or the like.
これによってＸ線透過箔１３は基板１２と押え板１５間
に緊締される。As a result, the X-ray transparent foil 13 is tightened between the substrate 12 and the holding plate 15.
［発明の効果］
以上のように本発明によるときにはＸ線透過箔の全周を
押え板で押えて金属基板に定着させるため、支持が強固
となり、構造が簡単ながら確実に固定してＸ線窓の信頼
性を高めることができる効果を有する。[Effects of the Invention] As described above, according to the present invention, the entire circumference of the X-ray transparent foil is held down by the press plate and fixed to the metal substrate, so the support is strong, and although the structure is simple, the X-ray window can be fixed securely. This has the effect of increasing reliability.
第１図は本発明の一実施例を示すＸ線窓の断面図、第２
図は従来のＸ線窓の斜視図である。
１１・・・Ｘ線透過領域 １２・・・金属基板１３
・・・Ｘ線透過箔 １４・・・窓孔１５・・・押
え板 １６・・・ねじ第１図Fig. 1 is a sectional view of an X-ray window showing one embodiment of the present invention;
The figure is a perspective view of a conventional X-ray window. 11... X-ray transmission area 12... Metal substrate 13
... X-ray transparent foil 14 ... Window hole 15 ... Holding plate 16 ... Screw Figure 1
Claims (1)
域に臨ませて該金属基板に重ね合せたＸ線透過箔と、該
Ｘ線透過箔の周縁を押えて金属基板に定着させる押え板
とを有することを特徴とするＸ線窓。(1) A metal substrate with an open X-ray transparent area, an X-ray transparent foil overlaid on the metal substrate facing the X-ray transparent area, and fixation to the metal substrate by pressing the periphery of the X-ray transparent foil. An X-ray window characterized by having a holding plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15183687A JPS63314500A (en) | 1987-06-17 | 1987-06-17 | X-ray window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15183687A JPS63314500A (en) | 1987-06-17 | 1987-06-17 | X-ray window |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63314500A true JPS63314500A (en) | 1988-12-22 |
Family
ID=15527361
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15183687A Pending JPS63314500A (en) | 1987-06-17 | 1987-06-17 | X-ray window |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63314500A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4836300B1 (en) * | 1969-04-03 | 1973-11-02 | ||
| JPS6013300A (en) * | 1983-07-04 | 1985-01-23 | 株式会社トーキン | Window for electron ray |
-
1987
- 1987-06-17 JP JP15183687A patent/JPS63314500A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4836300B1 (en) * | 1969-04-03 | 1973-11-02 | ||
| JPS6013300A (en) * | 1983-07-04 | 1985-01-23 | 株式会社トーキン | Window for electron ray |
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