JPS633136U - - Google Patents

Info

Publication number

JPS633136U

JPS633136U JP9744886U JP9744886U JPS633136U JP S633136 U JPS633136 U JP S633136U JP 9744886 U JP9744886 U JP 9744886U JP 9744886 U JP9744886 U JP 9744886U JP S633136 U JPS633136 U JP S633136U

Authority

JP

Japan

Prior art keywords

wafer

support means

end opening

wafer support

heating

Prior art date

1986-06-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 235000012431 wafers Nutrition 0.000 claims 7
• 238000010438 heat treatment Methods 0.000 claims 2
• 239000012495 reaction gas Substances 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
• 229910052736 halogen Inorganic materials 0.000 description 1
• 150000002367 halogens Chemical class 0.000 description 1