JPS6331360U - - Google Patents
Info
- Publication number
- JPS6331360U JPS6331360U JP12461086U JP12461086U JPS6331360U JP S6331360 U JPS6331360 U JP S6331360U JP 12461086 U JP12461086 U JP 12461086U JP 12461086 U JP12461086 U JP 12461086U JP S6331360 U JPS6331360 U JP S6331360U
- Authority
- JP
- Japan
- Prior art keywords
- laser light
- laser
- lens
- light source
- fan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007547 defect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12461086U JPS6331360U (un) | 1986-08-15 | 1986-08-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12461086U JPS6331360U (un) | 1986-08-15 | 1986-08-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6331360U true JPS6331360U (un) | 1988-02-29 |
Family
ID=31016786
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12461086U Pending JPS6331360U (un) | 1986-08-15 | 1986-08-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6331360U (un) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003166948A (ja) * | 2001-12-04 | 2003-06-13 | Topcon Corp | 表面検査装置 |
-
1986
- 1986-08-15 JP JP12461086U patent/JPS6331360U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003166948A (ja) * | 2001-12-04 | 2003-06-13 | Topcon Corp | 表面検査装置 |