JPS6331312U - - Google Patents
Info
- Publication number
- JPS6331312U JPS6331312U JP12477986U JP12477986U JPS6331312U JP S6331312 U JPS6331312 U JP S6331312U JP 12477986 U JP12477986 U JP 12477986U JP 12477986 U JP12477986 U JP 12477986U JP S6331312 U JPS6331312 U JP S6331312U
- Authority
- JP
- Japan
- Prior art keywords
- chambers
- gas flow
- hole
- gas
- hole position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 11
- 238000010586 diagram Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measuring Arrangements Characterized By The Use Of Fluids (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12477986U JPS6331312U (enExample) | 1986-08-13 | 1986-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12477986U JPS6331312U (enExample) | 1986-08-13 | 1986-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6331312U true JPS6331312U (enExample) | 1988-02-29 |
Family
ID=31017110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12477986U Pending JPS6331312U (enExample) | 1986-08-13 | 1986-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6331312U (enExample) |
-
1986
- 1986-08-13 JP JP12477986U patent/JPS6331312U/ja active Pending