JPS6331312U - - Google Patents

Info

Publication number
JPS6331312U
JPS6331312U JP12477986U JP12477986U JPS6331312U JP S6331312 U JPS6331312 U JP S6331312U JP 12477986 U JP12477986 U JP 12477986U JP 12477986 U JP12477986 U JP 12477986U JP S6331312 U JPS6331312 U JP S6331312U
Authority
JP
Japan
Prior art keywords
chambers
gas flow
hole
gas
hole position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12477986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12477986U priority Critical patent/JPS6331312U/ja
Publication of JPS6331312U publication Critical patent/JPS6331312U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP12477986U 1986-08-13 1986-08-13 Pending JPS6331312U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12477986U JPS6331312U (enrdf_load_stackoverflow) 1986-08-13 1986-08-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12477986U JPS6331312U (enrdf_load_stackoverflow) 1986-08-13 1986-08-13

Publications (1)

Publication Number Publication Date
JPS6331312U true JPS6331312U (enrdf_load_stackoverflow) 1988-02-29

Family

ID=31017110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12477986U Pending JPS6331312U (enrdf_load_stackoverflow) 1986-08-13 1986-08-13

Country Status (1)

Country Link
JP (1) JPS6331312U (enrdf_load_stackoverflow)

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